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Volumn Part F133492, Issue , 1998, Pages 895-899
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Use of compliant adhesives in the large area processing of MCM-D substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESIVES;
ALUMINA;
ALUMINUM OXIDE;
NETWORK COMPONENTS;
PALLETS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE MODELS;
SUBSTRATES;
THERMODYNAMIC STABILITY;
THIN FILMS;
LARGE-AREA PROCESSING;
MATERIAL PARAMETER;
REWORKABILITY;
STRINGENT REQUIREMENT;
THERMO-MECHANICAL RESPONSE;
THERMO-MECHANICAL STRESS;
THIN-FILM PROCESSING;
TIME REDUCTION;
SUBSTRATES;
MULTICHIP MODULES;
REWORKABILITY;
THERMOMECHANICAL RESPONSE;
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EID: 0031620455
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ECTC.1998.678814 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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