The characterization of SiGe/Si multilayers via an unambiguous solution of the inverse problem in x-ray Bragg diffraction

Journal of Physics D: Applied Physics

Volumn 30, Issue 17, 1997, Pages 2373-2378

  Nikulin, A Yu ^a   Zaumseil, P ^b   Petrashen', P V ^c  

^a MONASH UNIVERSITY   (Australia)

^b IHP   (Germany)

^c Scintag Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

X RAY BRAGG DIFFRACTION;

COMPOSITION EFFECTS; INVERSE PROBLEMS; MATHEMATICAL MODELS; MATHEMATICAL TRANSFORMATIONS; MULTILAYERS; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0031558469     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/17/002     Document Type: Article

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