Heteroepitaxy of GaN and related materials with a novel two-flow MOVPE horizontal reactor

Applied Surface Science

Volumn 117-118, Issue , 1997, Pages 530-535

  Nishida, K ^a   Uchida, K ^a,b   Kondo, M ^a   Kukimoto, H ^a,c   Munekata, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b HITACHI LTD   (Japan)

^c TOPPAN PRINTING CO LTD   (Japan)

Author keywords

GaN; Heterointerface; Metal organic vapor phase epitaxy; Wurtzite; X ray diffraction

Indexed keywords

INTERFACES (MATERIALS); METALLORGANIC VAPOR PHASE EPITAXY; SEMICONDUCTING INDIUM COMPOUNDS; X RAY CRYSTALLOGRAPHY;

HORIZONTAL REACTOR; SEMICONDUCTING GALLIUM NITRIDE; WURTZITE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0031548440     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)80137-7     Document Type: Article

References (15)

1. S. Nakamura, M. Senoh, N. Iwasa, S. Nagahama, Jpn. J. Appl. Phys. 34 (1995) L797.
2. S. Nakamura, M. Senoh, N. Iwasa, S. Nagahama, T. Yamada, T. Murai, Jpn. J. Appl. Phys. 34 (1995) L1332.
3. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, Y. Sugimoto, Jpn. J. Appl. Phys. 35 (1996) L74.
4. I. Akasaki, H. Amano, S. Sota, H. Sakai, T. Tanaka, T. Koike, Jpn. J. Appl. Phys. 34 (1995) L1517.
5. T. Sasaki, T. Matsuoka, J. Appl. Phys. 77 (1995) 192.
6. S. Nakamura, Jpn. J. Appl. Phys. 30 (1991) L1705.
7. I. Akasaki, K. Hiramatsu, H. Amano, Memories of the Faculty of Engineering, Nagoya University, 43(2) (1991) 147.
8. Y. Koide, N. Itoh, K. Itoh, N. Sawaki, I. Akasaki, Jpn. J. Appl. Phys. 27 (1988) 1156.
9. X.H. Wu, D. Kaoplnek, E.J. Tarsa, B. Heying, S. Keller, B.P. Keller, U.K. Mishra, S.P. DenBaars, J.S. Speck, Appl. Phys. Lett. 68 (1996) 1371.
10. T. Matsuoka, J. Cryst. Growth 124 (1992) 433.
11. M. Shimizu, K. Hiramatsu, N. Sawaki, J. Cryst. Growth 145 (1994) 209.
12. K. Nishida, S. Haneda, K. Hara, H. Munekata, H. Kukimoto, J. Cryst. Growth 170 (1997) 312.
13. A. Koukitu, N. Takahashi, T. Taki, H. Seki, J. Cryst. Growth 170 (1997) 306.
14. T. Matsuoka, H. Tanaka, T. Sasaki, A. Katsui, Inst. Phys. Conf. Ser. 106 (1990) 141.
15. T. Ogino, M. Aoki, Jpn. J. Appl. Phys. 19 (1980) 2395.