Channeled ion beam synthesis of erbium suicide: Comparison of experimental studies and binary collision simulations

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 311-315

  Wahl, U ^a   Vantomme, A ^a   Wu, M F ^a,b   Pattyn, H ^a   Langouche, G ^a  

^a KU LEUVEN   (Belgium)

^b PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; ION IMPLANTATION; SPUTTERING; SYNTHESIS (CHEMICAL);

BINARY COLLISION SIMULATIONS; CHANNELED ION BEAM SYNTHESIS; ERBIUM SILICIDE; SOFTWARE PACKAGE MARLOWE;

SILICON COMPOUNDS;

EID: 0031547614     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00946-9     Document Type: Article

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