Surface modifications by gas cluster ion beams

Nuclear Inst. and Methods in Physics Research, B

Volumn 106, Issue 1-4, 1995, Pages 165-169

  Yamada, I ^a   Matsuo, J ^a   Insepov, Z ^a   Akizuki, M ^b  

^a KYOTO UNIVERSITY   (Japan)

^b SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 58149209589     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)00697-4     Document Type: Article

References (10)

1. Proc. 13th Int. Conf. on Applications of Acclerators in Research and Industry
2. Proc. 13th Int. Conf. on Applications of Accelerators in Research and Industry
3. Proc. 3rd IUMRS Int. Conf. on Adv. Mat.
4. Energetic cluster impacts on thin gold and tantalum films
5. Proc. 3rd IUMRS Int. Conf. on Adv. Mat.
6. Proc. 7th Int. Sympon. Small Particles & Inorganic Clusters