Sputtering investigation of boron nitride with secondary ion and secondary neutral mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 2, 1997, Pages 243-247

  Zhang, J ^a   Bhattacharjee, S ^a   Shutthanandan, V ^a   Ray, P K ^a  

^a TUSKEGEE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031490166     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580519     Document Type: Article

References (10)

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