Molten targets in pulsed laser deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3404, Issue , 1997, Pages 2-7

  Szörényi, Tamás ^a   Kántor, Zoltán ^a   Tóth, Zsolt ^a  

^a RESEARCH GROUP ON LASER PHYSICS   (Hungary)

Author keywords

Particulates; PLD; Pulsed laser deposition; Thin films

Indexed keywords

INDIUM; PHASE TRANSITIONS; SUBSTRATES; THIN FILMS; VACUUM;

LIQUID TARGETS;

PULSED LASER DEPOSITION;

EID: 0031393562     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308595     Document Type: Conference Paper

References (10)

1. Particulates generated by pulsed laser ablation
2. Particulate reduction in the pulsed laser deposition of barium titanate thin films
3. High-quality optical and epitaxial Ge films formed by laser evaporation
4. Liquid target pulsed laser deposition
5. Growing diamond films from an organic liquid
6. Growth of c-axis oriented gallium nitride thin films on an amorphous substrate by the liquid-target pulsed laser deposition technique
7. Liquid-target pulsed laser deposition and its application to gallium nitride thin films
8. GAN thin films deposition by laser ablation of liquid Ga target in nitrogen reactive atmosphere
9. Growth of G and AlN thin films by laser induced molecular beam epitaxy
10. Pulsed laser deposition of metals