A Monte-Carlo computer simulation of ion sputtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3345, Issue , 1997, Pages 252-259

  Zhurkin, E E ^a   Ivanov, D P ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

Atomic collisions; Ion bombardment; Ion sputtering; Monte Carlo simulation; Preferential sputtering; Surface

Indexed keywords

ATOMIC PHYSICS; BINDING ENERGY; COMPUTER SIMULATION; ELECTRON SCATTERING; ION BOMBARDMENT; MONTE CARLO METHODS; PARAMETER ESTIMATION; SPUTTERING;

ATOMIC COLLISIONS;

ION BEAMS;

EID: 0031392255     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.299605     Document Type: Conference Paper

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