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Volumn 233-237, Issue PART II, 1996, Pages 991-995

Computer simulation of the sputtering of polyatomic multilayered materials with consideration of the spatial overlapping of the collision cascades

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; COMPUTER SOFTWARE; IONS; MONTE CARLO METHODS; SPUTTERING;

EID: 0030259126     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(96)00074-8     Document Type: Article
Times cited : (24)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.