MicroJoinery for optomechanical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 171-178

  Gonzalez, C ^a   Welty, R J ^a   Smith, R L ^a   Collins, S D ^a  

^a Damien Associates   (United States)

Author keywords

Anisotropic etching; MEMS; Microfabrication; Optics; Silicon

Indexed keywords

ETCHING; FABRICATION; MASKS; MICROMACHINING; MICROOPTICS; MICROSTRUCTURE; OPTICAL COMMUNICATION; OPTICAL FIBERS; OPTICAL IMAGE STORAGE; OPTICAL RECORDING; OPTICAL SWITCHES; PHOTODIODES; SURFACE TREATMENT;

MICROJOINERY; OPTICAL MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031389907     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271438     Document Type: Conference Paper

References (14)