Fabrication and application of subwavelength gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 233-241

  Schnabel, B ^a   Kley, E B ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

E beam lithography; Polarization; Subwavelength gratings; Waveguide coupling

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; LIGHT POLARIZATION; PHOTORESISTS; REACTIVE ION ETCHING; WAVEGUIDE COUPLERS;

SUBWAVELENGTH GRATINGS;

DIFFRACTION GRATINGS;

EID: 0031389510     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271418     Document Type: Conference Paper

References (11)

1. E-beam lithography: An efficient tool for the fabrication of diffractive and micro-optical elements
2. Optical characterization method for high frequency gratings
3. Subwavelength structured surfaces: Design and applications
4. Lamellar gratings as polarization components for specularly reflected beams
5. Grid polarizer for the visible spectral region
6. Application of metallic subwavelength gratings for polarization devices
7. Second harmonic generation using subwavelength gratings in planar waveguides
8. Highly efficient blazed grating couplers in planar polymer waveguides
9. Efficient focusing and beam shaping grating couplers into polymer waveguides
10. Replication of microoptical profiles in Ormocer and other polymers