-
1
-
-
0642341426
-
-
H. Mimura, T. Matsumoto, T. Futagi, and Y. Kanemitsu, J. Phys. Soc. Jpn, 63 Suppl. B, 203, (1994).
-
(1994)
J. Phys. Soc. Jpn
, vol.63
, Issue.SUPPL. B
, pp. 203
-
-
Mimura, H.1
Matsumoto, T.2
Futagi, T.3
Kanemitsu, Y.4
-
2
-
-
0029210773
-
-
M. G. Berger, M. Thönissen, R. Arens-Rscher, H. Münder, H. Lüth, M. Arntzen, W. Theiß, Thin Sol. Films 255, 313, (1995).
-
(1995)
Thin Sol. Films
, vol.255
, pp. 313
-
-
Berger, M.G.1
Thönissen, M.2
Arens-Rscher, R.3
Münder, H.4
Lüth, H.5
Arntzen, M.6
Theiß, W.7
-
4
-
-
0015771980
-
2O-Isopropyl Alcohol
-
Semiconductor Silicon, H. R. Huff and R. R. Burgess, Princeton (ed. ), NJ
-
2O-Isopropyl Alcohol", in Semiconductor Silicon, H. R. Huff and R. R. Burgess, Princeton (ed. ), NJ, Electrochemical Society Proceedings, 1973, p. 339
-
(1973)
Electrochemical Society Proceedings
, pp. 339
-
-
Price, J.B.1
-
5
-
-
4243180166
-
Microgears and Turbines Etched from Silicon
-
K. J. Gabriel, W. S. N. Trimmer, and M Mehregany, "Microgears and Turbines Etched from Silicon", Tech. Digest, Transducers "87, 1987, p. 853.
-
(1987)
Tech. Digest, Transducers
, vol.87
, pp. 853
-
-
Gabriel, K.J.1
Trimmer, W.S.N.2
Mehregany, M.3
-
6
-
-
0023014962
-
Micro-Diaphragm Pressure Sensor
-
IEDM, Los Angeles
-
S. Sugiyama, T. Suzuky, K. Kawahata, K. Shimaoka, M. Takigawa, and I. Igarashi, "Micro-Diaphragm Pressure Sensor", Tech. Digest, IEDM, Los Angeles, 1986, p. 184
-
(1986)
Tech. Digest
, pp. 184
-
-
Sugiyama, S.1
Suzuky, T.2
Kawahata, K.3
Shimaoka, K.4
Takigawa, M.5
Igarashi, I.6
-
7
-
-
21844481333
-
-
[71 A. Drost, P. Steiner, H. Moser, W. Lang: Sensors and Materials 7(2), 111 (1995).
-
(1995)
Sensors and Materials
, vol.7
, Issue.2
, pp. 111
-
-
Drost, A.1
Steiner, P.2
Moser, H.3
Lang, W.4
-
8
-
-
0028430143
-
-
W. Lang, P. Steiner, A. Richter, K. Marusczyk, G. Weimann, H. Sandmaier: Sensors and Actuators A 43, 239 (1994).
-
(1994)
Sensors and Actuators A
, vol.43
, pp. 239
-
-
Lang, W.1
Steiner, P.2
Richter, A.3
Marusczyk, K.4
Weimann, G.5
Sandmaier, H.6
-
10
-
-
0028344014
-
-
L. T. Canham, A. G. Cullis, C. Pickering, O. D. Dosser, T. I. Cox and T. P. Lynch, Nature, 368, (1994), 133.
-
(1994)
Nature
, vol.368
, pp. 133
-
-
Canham, L.T.1
Cullis, A.G.2
Pickering, C.3
Dosser, O.D.4
Cox, T.I.5
Lynch, T.P.6
-
12
-
-
0029231243
-
-
St. Fronhoff, R. Arens-Fisher, T. Heinrich, J Fricke, M. Arntzen, and W. Theiß, Thin Sol. Films 255, (1995), 115.
-
(1995)
Thin Sol. Films
, vol.255
, pp. 115
-
-
Fronhoff, S.1
Arens-Fisher, R.2
Heinrich, T.3
Fricke, J.4
Arntzen, M.5
Theiß, W.6
-
13
-
-
0030122952
-
-
O. Belmont, C. Faivre, D. Bellet, and Y. Bréchet, Thin Sol. Films 276, 219 (1996).
-
(1996)
Thin Sol. Films
, vol.276
, pp. 219
-
-
Belmont, O.1
Faivre, C.2
Bellet, D.3
Bréchet, Y.4
-
14
-
-
0030571898
-
-
G. Amato, and N. Brunetto, Mater. Lett. 26, 6, 295-298, (1996).
-
(1996)
Mater. Lett.
, vol.26
, Issue.6
, pp. 295-298
-
-
Amato, G.1
Brunetto, N.2
-
20
-
-
0022667501
-
-
O. Pessoa, C. L. Cesar, N. A. Patel, H. Vargas, C. C. Guizoni, L. C. M. Miranda, J. Appl. Phys. 59, 1316 (1986).
-
(1986)
J. Appl. Phys.
, vol.59
, pp. 1316
-
-
Pessoa, O.1
Cesar, C.L.2
Patel, N.A.3
Vargas, H.4
Guizoni, C.C.5
Miranda, L.C.M.6
-
22
-
-
0024717940
-
-
G. Amato, G. Benedetto, R. Spagnolo, M. Tumaturi: Phys. Stat. Sol. (a) 114, 519 (1989).
-
(1989)
Phys. Stat. Sol. (A)
, vol.114
, pp. 519
-
-
Amato, G.1
Benedetto, G.2
Spagnolo, R.3
Tumaturi, M.4
-
25
-
-
0023401258
-
-
A. Skumanic, H. Dersch, M. Fathallah, N. M. Amer, Appl. Phys. A, 43, 297 (1987).
-
(1987)
Appl. Phys. A
, vol.43
, pp. 297
-
-
Skumanic, A.1
Dersch, H.2
Fathallah, M.3
Amer, N.M.4
-
26
-
-
84902974864
-
-
Strasbourg to be published on Thin Solid Films
-
M. G. Beghi, C. E. Bottani, G. Ghislotti, G. Amato, and L. Boarino, European MRS conference, Strasbourg 1996, to be published on Thin Solid Films.
-
(1996)
European MRS Conference
-
-
Beghi, M.G.1
Bottani, C.E.2
Ghislotti, G.3
Amato, G.4
Boarino, L.5
-
27
-
-
85005992880
-
-
Rettelbach, T. , J. Sauberlich, S. Korder, and J. Fricke, Journal of Non-Crystalline Solids 186: 278-284. (1995)
-
(1995)
Journal of Non-Crystalline Solids
, vol.186
, pp. 278-284
-
-
Rettelbach, T.1
Sauberlich, J.2
Korder, S.3
Fricke, J.4
|