Sol-gel derived RuO2-PZT-RuO2 ferroelectric capacitors

Integrated Ferroelectrics

Volumn 18, Issue 1-4, 1997, Pages 287-295

  Teowee, G ^a   Boulton, J M ^a   Hassan, S ^a   McCarthy, K ^a   McCarthy, F ^a   Bukowski, T J ^a   Alexander, T P ^b   Uhlmann, D R ^b  

^a Donnelly Corporation   (United States)

^b University of Arizona   (United States)

Author keywords

Fatigue; Ferroelectric capacitors; PZT 53 47; RuO2 films

Indexed keywords

CAPACITORS; ELECTRIC CONDUCTIVITY OF SOLIDS; FERROELECTRICITY; LEAD COMPOUNDS; MICROSTRUCTURE; RUTHENIUM COMPOUNDS; SILICA; SILICON WAFERS; SOL-GELS; THIN FILMS;

FERROELECTRIC CAPACITOR; LEAD ZIRCONATE TITANATE; RUTHENIUM DIOXIDE;

FERROELECTRIC DEVICES;

EID: 0031383652     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708221706     Document Type: Article

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