Characterization of solution derived RuO2 electrodes for Pb(Zr, Ti)O3 microcapacitors

Journal of the Electrochemical Society

Volumn 143, Issue 9, 1996, Pages 3008-3013

  Watanabe, Koji ^a   Tressler, James F ^a,b   Sadamoto, Miho ^a   Isobe, Chiharu ^a   Tanaka, Masahiro ^a  

^a SONY CORPORATION   (Japan)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY; ELECTRODES; FATIGUE OF MATERIALS; LEAD COMPOUNDS; MORPHOLOGY; MULTILAYERS; OXIDES; RUTHENIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY;

CRYSTALLINITY; LEAD ZIRCONYL TITANATE; NONVOLATILE RANDOM ACCESS MEMORY; ROOT SQUARE MEAN ROUGHNESS; RUTHENIUM DIOXIDE; SPIN ON TECHNIQUE;

THIN FILMS;

EID: 0030245081     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837140     Document Type: Article

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