메뉴 건너뛰기




Volumn 79, Issue 2, 1996, Pages 525-529

Synthesis of ruthenium dioxide thin films by a solution chemistry technique

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE MEASUREMENT; FIRING (OF MATERIALS); GRAIN GROWTH; GRAIN SIZE AND SHAPE; RUTHENIUM COMPOUNDS; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 0030087260     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08159.x     Document Type: Article
Times cited : (25)

References (18)
  • 2
  • 4
    • 36549091137 scopus 로고
    • 2-based thick film resistors using Nd:YAG laser
    • 2-Based Thick Film Resistors Using Nd:YAG Laser," J. Appl. Phys., 66 [12] 6126-31 (1989).
    • (1989) J. Appl. Phys. , vol.66 , Issue.12 , pp. 6126-6131
    • Gofuku, E.1    Ogama, T.2    Takasago, H.3
  • 7
    • 0141444497 scopus 로고
    • Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization
    • L. Krusin-Elbaum, M. Wittmer, and D. S. Yee, "Characterization of Reactively Sputtered Ruthenium Dioxide for Very Large Scale Integrated Metallization," Appl. Phys. Lett., 50 [26] 1879-81 (1987).
    • (1987) Appl. Phys. Lett. , vol.50 , Issue.26 , pp. 1879-1881
    • Krusin-Elbaum, L.1    Wittmer, M.2    Yee, D.S.3
  • 8
    • 0022162031 scopus 로고
    • Chemical vapor deposition of ruthenium and ruthenium dioxide films
    • M. L. Green, M. E. Gross, L. E. Papa, K. J. Schnoes, and D. Brasen, "Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films," J. Electrochem Soc., 132 [11] 2677-85 (1985).
    • (1985) J. Electrochem Soc. , vol.132 , Issue.11 , pp. 2677-2685
    • Green, M.L.1    Gross, M.E.2    Papa, L.E.3    Schnoes, K.J.4    Brasen, D.5
  • 10
  • 12
    • 0017483025 scopus 로고
    • Studies on the oxide-coated metal anodes for chlor-alkali cells
    • F. Mine, M. Yasuda, and T. Yoshida, "Studies on the Oxide-Coated Metal Anodes for Chlor-alkali Cells," J. Electrochem. Soc., 124 [4] 500-505 (1977).
    • (1977) J. Electrochem. Soc. , vol.124 , Issue.4 , pp. 500-505
    • Mine, F.1    Yasuda, M.2    Yoshida, T.3
  • 15
    • 0025115487 scopus 로고
    • Preparation and properties of PZT thin films by metal alkoxides - DEA method
    • T. Suzuki, M. Matsuki, Y. Matsuda, K. Kobayashi, and Y. Takahashi, "Preparation and Properties of PZT Thin Films by Metal Alkoxides - DEA Method" (in Jpn.), J. Ceram. Soc. Jpn., 98 [8] 754-58 (1990).
    • (1990) J. Ceram. Soc. Jpn. , vol.98 , Issue.8 , pp. 754-758
    • Suzuki, T.1    Matsuki, M.2    Matsuda, Y.3    Kobayashi, K.4    Takahashi, Y.5
  • 17
    • 0000686920 scopus 로고
    • High-temperature chemistry of the ruthenium-oxygen system
    • W. E. Bell and M. Tagami, "High-Temperature Chemistry of the Ruthenium-Oxygen System," J. Phys. Chem., 67, 2432-36 (1963).
    • (1963) J. Phys. Chem. , vol.67 , pp. 2432-2436
    • Bell, W.E.1    Tagami, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.