Fabrication of LIGA mold inserts using a modified procedure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 168-173

  Galhotra, Vikas ^a   Marques, Christophe ^a   Desta, Yohannes M ^a   Kelly, Kevin W ^a   Despa, Mircea ^a   Pendse, Ajit ^a   Collier, John ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH ASPECT RATIO MICROSTRUCTURES; LIGA MOLD INSERTS;

CHEMICAL BONDS; ELECTROPLATING; FABRICATION; MICROSTRUCTURE; MOLDING; NICKEL; POLYMETHYL METHACRYLATES; X RAY LITHOGRAPHY;

MICROELECTRONICS;

EID: 0030418499     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)