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Volumn 67, Issue 9, 1996, Pages 3378-

X‐ray microfabrication activities at the Center for Advanced Microstructures and Devices (CAMD) (invited)

Author keywords

FABRICATION; MACHINING; MICROSTRUCTURE; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; USES; X RADIATION

Indexed keywords


EID: 84889517088     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1147311     Document Type: Conference Paper
Times cited : (10)

References (0)
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