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Volumn 67, Issue 9, 1996, Pages 3378-
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X‐ray microfabrication activities at the Center for Advanced Microstructures and Devices (CAMD) (invited)
a a a a a a |
Author keywords
FABRICATION; MACHINING; MICROSTRUCTURE; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; USES; X RADIATION
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Indexed keywords
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EID: 84889517088
PISSN: 00346748
EISSN: 10897623
Source Type: Journal
DOI: 10.1063/1.1147311 Document Type: Conference Paper |
Times cited : (10)
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References (0)
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