Strength and fracture of micromachined silicon structures

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 99-104

  Suwito, Wan ^a   Dunn, Martin L ^a   Cunningham, Shawn J ^b  

^a UCB 450   (United States)

^b Ford Microelectronics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; FRACTURE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SINGLE CRYSTALS; STRENGTH OF MATERIALS; TENSILE TESTING; THIN FILM DEVICES;

MICROMACHINED SINGLE CRYSTAL SILICON STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031362513     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)

1. Cunningham, S., Suwito, W., and Read, D. T., 1995, "Tensile Testing of Epitaxial Silicon Films," in Proc. 8th Int. Conf. Solid-State Sensors and Actuators, Transducers 95, pp. 96-99.
2. Dunn, M. L., Suwito, W., Cunningham, S., and May, C. W., 1997, "Fracture Initiation at Sharp Notches under Mode I, Mode II, and Mild Mixed Mode Loading," International Journal of Fracture, in press.
3. Greek, S., Ericson, F., Johansson, S., and Schweite, J.-A., 1997, "In-situ Tensile Strength Measurement and Weibull Analysis of Thick Film and Thin Film Micromachined Polysilicon Structures," Thin Solid Films, Vol. 292, pp. 247-254.
4. Labossiere, P. E. W. and Dunn, M. L., to be published.
5. Petersen, K. E., 1982, "Silicon as a Mechanical Material," Proc. IEEE, Vol. 70, pp.420-457.
6. Read, D. T., 1997, personal correspondence.
7. Read, D. T. and Dally, J.W., 1993, "A New Method for Measuring the Strength and Ductility of Thin Films," J. Mater. Res., Vol. 8, pp. 1542-1549.
8. Read, D. T. and Dally, J. W., 1994, "Mechanical Behavior of Aluminum and Copper Thin Films," AMD-Vol. 187, Mechanics and Materials for Electronic Packaging,: Volume 2 - Thermal and Mechanical Behavior and Modeling, ASME, pp. 41-49.
9. Sehweitz, J.-A., 1992, "Mechanical Characterization of Thin Films by Micromechanical Techniques," MRS Bulletin., Vol. 17, pp. 34-45.
10. Sharpe, W. N., Yuan, B., Vaidyanathan, R., and Edwards, R. L., 1996, "New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials," Proc. of the 1996 SPIE Symposium on Micromachining and Microfabrication, Oct. 14-15, Austin, TX, pp.78-91.
11. Stroh, A. N., 1958, "Dislocations and Cracks in Anisotropic Elasticity," Phil Mag., Vol.3, pp.625-646.
12. Ting, T. C. T., 1996, Anisotropic Elasticity: Theory and Applications, Oxford University Press.