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Volumn 144, Issue 12, 1997, Pages 4119-4122

Different behavior in the deposition of platinum from HF solutions on n- and p-type (100) Si substrates

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELECTROCHEMISTRY; HYDROFLUORIC ACID; MORPHOLOGY; OXIDATION; PLATINUM; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0031339069     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838152     Document Type: Article
Times cited : (33)

References (26)
  • 7
    • 0004234068 scopus 로고
    • John Wiley & Sons, Inc., New York
    • See, for example, Modern Electroplating, F. A. Lowenheim, Editor, John Wiley & Sons, Inc., New York (1974).
    • (1974) Modern Electroplating
    • Lowenheim, F.A.1
  • 9
    • 33750861317 scopus 로고
    • See, for example, M. Paunovic, T. Nguyen, R. Mukherjee, C. Sambucetti, and L. T. Romankiw, This Journal, 142, 1495 (1995); C. Y. Mak, MRS Bulletin, XIX (8), 55 (1994).
    • (1994) MRS Bulletin , vol.19 , Issue.8 , pp. 55
    • Mak, C.Y.1
  • 10
    • 5944241666 scopus 로고    scopus 로고
    • U.S. Pat. 3,857,733 (1974) of the recipes in Ref. 2 and 3
    • See, for example, A. F. Arnold, U.S. Pat. 3,857,733 (1974) of the recipes in Ref. 2 and 3.
    • Arnold, A.F.1
  • 25
    • 5944253420 scopus 로고
    • H. Gerischer and C. W. Tobias, Editors, VCH Verlagsgesellschaft GmbH, Weinheim
    • P. Allongue, in Advances in Electrochemical Science and Engineering, Vol. 4, H. Gerischer and C. W. Tobias, Editors, p. 42, VCH Verlagsgesellschaft GmbH, Weinheim (1995).
    • (1995) Advances in Electrochemical Science and Engineering , vol.4 , pp. 42
    • Allongue, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.