First stages of platinum electroless deposition on silicon(100) from hydrogen fluoride solutions studied by AFM

Thin Solid Films

Volumn 275, Issue 1-2, 1996, Pages 12-17

  Gorostiza, P ^a   Servat, J ^a   Morante, J R ^a   Sanz, F ^b  

^a Dept de Fis Apl i Electronica   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Atomic force microscopy; Deposition process; Platinum; Silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROLESS PLATING; ETCHING; HYDROGEN INORGANIC COMPOUNDS; PH; SALTS; SILICON; SILICON COMPOUNDS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON DISPERSIVE SPECTROSCOPY; HYDROGEN FLUORIDE SOLUTIONS; PLATINUM ELECTROLESS DEPOSITION; PLATINUM NUCLEI; PLATINUM SALT; PLATINUM SILICIDE;

PLATINUM;

EID: 0030125373     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)07009-5     Document Type: Article

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