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Volumn 144, Issue 3, 1997, Pages 909-914

Atomic force microscopy study of the silicon doping influence on the first stages of platinum electroless deposition

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; MORPHOLOGY; PLATINUM; POLYCRYSTALLINE MATERIALS; REDOX REACTIONS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0031101611     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837506     Document Type: Article
Times cited : (51)

References (25)
  • 7
    • 0004234068 scopus 로고
    • John Wiley & Sons, Inc., New York
    • See, for example, Modern Electroplating, F. A. Lowenheim, Editor, John Wiley & Sons, Inc., New York (1974).
    • (1974) Modern Electroplating
    • Lowenheim, F.A.1
  • 9
    • 33750861317 scopus 로고
    • See, for example, M. Paunovic, T. Nguyen, R. Mukherjee, C. Sambucetti, and L. T. Romankiw, This Journal, 142, 1495 (1995), and C. Y. Mak, MRS Bull., XIX(8), 55 (1994).
    • (1994) MRS Bull. , vol.19 , Issue.8 , pp. 55
    • Mak, C.Y.1
  • 10
    • 6244290268 scopus 로고    scopus 로고
    • U.S. Pat 3,857,733 (1974), or the recipes in Ref. 2 and 3
    • See, for example, A. F. Arnold, U.S. Pat 3,857,733 (1974), or the recipes in Ref. 2 and 3.
    • Arnold, A.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.