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Volumn 18, Issue 12, 1997, Pages 592-594

Temperature dependence of Fowler-Nordheim current in 6H- and 4H-SiC MOS capacitors

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC BREAKDOWN; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRONS; MOSFET DEVICES; THYRISTORS;

EID: 0031333557     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.644081     Document Type: Article
Times cited : (173)

References (12)
  • 1
    • 5944253358 scopus 로고    scopus 로고
    • SiC power UMOSFET: Design, analysis and technological feasibility
    • ch, 7
    • M. Bhatnagar, D. Alok, and B. J. Baliga, "SiC power UMOSFET: Design, analysis and technological feasibility," Inst. Phys. Conf. Ser. no. 137, ch, 7, pp. 703-706, presented at the 5th SiC and Related Materials - ICSCRM-93, Washington, DC, 1993.
    • Inst. Phys. Conf. Ser. No. 137 , pp. 703-706
    • Bhatnagar, M.1    Alok, D.2    Baliga, B.J.3
  • 2
    • 3643140583 scopus 로고
    • presented Washington, DC
    • M. Bhatnagar, D. Alok, and B. J. Baliga, "SiC power UMOSFET: Design, analysis and technological feasibility," Inst. Phys. Conf. Ser. no. 137, ch, 7, pp. 703-706, presented at the 5th SiC and Related Materials - ICSCRM-93, Washington, DC, 1993.
    • (1993) 5th SiC and Related Materials - ICSCRM-93
  • 4
    • 36449002718 scopus 로고
    • Dielectric strength of thermal oxides on 6H-SiC and 4H-SiC
    • P. Friedrichs and E. P. Burte, "Dielectric strength of thermal oxides on 6H-SiC and 4H-SiC," Appl. Phys. Lett., vol. 65, no. 13, pp. 1665-1667, 1994.
    • (1994) Appl. Phys. Lett. , vol.65 , Issue.13 , pp. 1665-1667
    • Friedrichs, P.1    Burte, E.P.2
  • 6
    • 36449005240 scopus 로고
    • Anisotropy of the electron Hall mobility in 4H, 6H, and 15R silicon carbide
    • M. Schadt, G. Pensl, R. P. Devaty, W. J. Choyke, R. Stein, and D. Stephani, "Anisotropy of the electron Hall mobility in 4H, 6H, and 15R silicon carbide," Appl. Phys. Lett., vol. 65, no. 24, pp. 3120-3122, 1994.
    • (1994) Appl. Phys. Lett. , vol.65 , Issue.24 , pp. 3120-3122
    • Schadt, M.1    Pensl, G.2    Devaty, R.P.3    Choyke, W.J.4    Stein, R.5    Stephani, D.6
  • 7
    • 0000173385 scopus 로고
    • Temperature dependence of the Fowler-Nordheim current in metal-oxide-degenerate semiconductor structures
    • G. Pananakakis, G. Ghibaudo, R. Kies, and C. Papadas, "Temperature dependence of the Fowler-Nordheim current in metal-oxide-degenerate semiconductor structures," J. Appl. Phys., vol. 78, no. 4, pp. 2635-2641, 1995.
    • (1995) J. Appl. Phys. , vol.78 , Issue.4 , pp. 2635-2641
    • Pananakakis, G.1    Ghibaudo, G.2    Kies, R.3    Papadas, C.4
  • 11
    • 0000433062 scopus 로고
    • Electron effective masses and mobilities in high-purity 6H-SiC chemical vapor deposition layers
    • N. T. Son, O. Kordina, A. O. Konstantinov, W. M. Chen, E. Srman, B. Monemar, and E. Janzn, "Electron effective masses and mobilities in high-purity 6H-SiC chemical vapor deposition layers," Appl. Phys. Lett., vol. 65, no. 25, pp. 3209-3211, 1994.
    • (1994) Appl. Phys. Lett. , vol.65 , Issue.25 , pp. 3209-3211
    • Son, N.T.1    Kordina, O.2    Konstantinov, A.O.3    Chen, W.M.4    Srman, E.5    Monemar, B.6    Janzn, E.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.