Analyses of thermal stresses and control schemes for fast temperature ramps of batch furnaces

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 4, 1997, Pages 433-437

  Fan, Yong Hui ^a   Qiu, Taiqing ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Batch furnaces; Thermal processing

Indexed keywords

MATHEMATICAL MODELS; SILICON WAFERS; STRESS ANALYSIS; TEMPERATURE DISTRIBUTION; THERMAL STRESS; THERMOELASTICITY;

BATCH FURNACES; RAMP RATES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031276072     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.641485     Document Type: Article

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