Flux ionization of arc-like Ti vapor plasma

Vacuum

Volumn 48, Issue 11, 1997, Pages 893-897

  Kajioka, H ^a  

^a Western Hiroshima Prefecture Industrial Research Institute   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DENSIFICATION; ELECTRIC CURRENT MEASUREMENT; ELECTRON BEAMS; EVAPORATION; ION BOMBARDMENT; PLASMAS;

FLUX IONIZATION;

IONIZATION OF GASES;

EID: 0031275309     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00096-1     Document Type: Article

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