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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3147-3155

Optical emission spectroscopy from arc-like Ti vapor plasma and effects of self-ion bombardment on Ti and TiN film deposition

(3) Kajioka, H a Higuchi, K a Kawashimo, Y b

a Western Hiroshima Prefecture Industrial Research Institute (Japan)

b Shinko Seiki Co Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030494671 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580184 Document Type: Article

Times cited : (8)

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