SCOPUS 정보 검색 플랫폼

Journal of Crystal Growth

Volumn 181, Issue 3, 1997, Pages 293-296

Electrochemical etching of a conductive GaN crystal for patterning

(1) Yoshida, Seikoh a,b

a FURUKAWA ELECTRIC CO LTD (Japan)

b Optoelectronics Technol Res Lab (Japan)

Author keywords

AlGaN; Etching; GaN; KOH; Patterning

Indexed keywords

CRYSTAL GROWTH; ELECTROCHEMISTRY; ETCHING; MIRRORS; POTASSIUM COMPOUNDS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR GROWTH; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

ELECTROCHEMICAL ETCHING; GALLIUM NITRIDE; POTASSIUM HYDROXIDE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0031269774 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(97)00366-7 Document Type: Letter

Times cited : (18)

References (11)

1
- 0000815007
- S. Strite, H. Morkoç, J. Vac. Sci. Technol. B 10 (1992) 1237.
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 1237
- Strite, S.¹ Morkoç, H.²

2
- 0029779805
- S. Nakamura, M. Senoh, S. Nagahama, N. Iwase, T. Yamada, T. Matsushita, H. Kiyoku, Y. Sugimoto, Jpn. J. Appl. Phys. 35 (1996) L74.
- (1996) Jpn. J. Appl. Phys. , vol.35
- Nakamura, S.¹ Senoh, M.² Nagahama, S.³ Iwase, N.⁴ Yamada, T.⁵ Matsushita, T.⁶ Kiyoku, H.⁷ Sugimoto, Y.⁸

3
- 0029405049
- I. Akasaki, H. Amano, S. Sato, H. Sakai, T. Tanaka, M. Koike, Jpn. J. Appl. Phys. 34 (1995) L1517.
- (1995) Jpn. J. Appl. Phys. , vol.34
- Akasaki, I.¹ Amano, H.² Sato, S.³ Sakai, H.⁴ Tanaka, T.⁵ Koike, M.⁶

4
- 21544461610
- H. Morkoç, S. Strite, G.B. Gao, M.E. Lin, B. Sverdlov, M. Burns, J. Appl. Phys. 76 (1994) 1363.
- (1994) J. Appl. Phys. , vol.76 , pp. 1363
- Morkoç, H.¹ Strite, S.² Gao, G.B.³ Lin, M.E.⁴ Sverdlov, B.⁵ Burns, M.⁶

5
- 36449006910
- M.A. Khan, M.S. Shur, J.N. Kuznia, Q. Chen, J. Burm, W. Schaff, Appl. Phys. Lett. 66 (1995) 1083.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1083
- Khan, M.A.¹ Shur, M.S.² Kuznia, J.N.³ Chen, Q.⁴ Burm, J.⁵ Schaff, W.⁶

6
- 21544471895
- I. Adesida, A. Mahjan, E. Andideh, M.A. Khan, D.T. Olsen, J.N. Kuznia, Appl. Phys. Lett. 63 (1993) 2777.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2777
- Adesida, I.¹ Mahjan, A.² Andideh, E.³ Khan, M.A.⁴ Olsen, D.T.⁵ Kuznia, J.N.⁶

7
- 0028368821
- M.E. Lin, Z.F. Fan, Z. Ma, L.H. Allen, H. Morkoç, Appl. Phys. Lett. 64 (1994) 887.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 887
- Lin, M.E.¹ Fan, Z.F.² Ma, Z.³ Allen, L.H.⁴ Morkoç, H.⁵

8
- 0006035894
- T.L. Chu, J. Electrochem. Soc. 118 (1971) 1200.
- (1971) J. Electrochem. Soc. , vol.118 , pp. 1200
- Chu, T.L.¹

9
- 0040765272
- J.I. Pankov, J. Electrochem. Soc. 119 (1972) 1110.
- (1972) J. Electrochem. Soc. , vol.119 , pp. 1110
- Pankov, J.I.¹

10
- 0019872687
- E. Lakshmi, Thin Solid Films 83 (1981) L137.
- (1981) Thin Solid Films , vol.83
- Lakshmi, E.¹

11
- 0006240385
- S. Yoshida, J. Appl. Phys. 81 (1997) 7966.
- (1997) J. Appl. Phys. , vol.81 , pp. 7966
- Yoshida, S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.