Design considerations and performance of a combined scanning tunneling and scanning electron microscope

Review of Scientific Instruments

Volumn 68, Issue 10, 1997, Pages 3790-3798

  Wiessner, A ^a   Kirschner, J ^a   Schafer G ^b   Berghaus, Th ^b  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b Omicron Vakuumphysik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRON BEAMS; ELECTRON ENERGY ANALYZERS; IMAGING TECHNIQUES; LOW ENERGY ELECTRON DIFFRACTION; PERFORMANCE; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ANALYSIS; DESIGN CONCEPT; REALIZATION; REGION RECOVERY; SCANNING AUGER MICROSCOPY; TIP APPROACH;

MICROSCOPES;

EID: 0031256427     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148028     Document Type: Article

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