Local growth studies of CVD diamond using a probe-like substrate

IEEE Transactions on Plasma Science

Volumn 25, Issue 5, 1997, Pages 1058-1065

  Berghaus, Jörg Oberste ^a   Meunier, Jean Luc ^a   Gitzhofer, François ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

Chemical vapor deposition; Diamond film; Probe like substrate; Rf thermal plasma; Thermal boundary layer

Indexed keywords

BOUNDARY LAYERS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; EMISSION SPECTROSCOPY; FILM GROWTH; HEAT FLUX; MOLYBDENUM; SUBSTRATES;

PLASMA CHEMICAL VAPOR DEPOSITION; RADIOFREQUENCY THERMAL PLASMAS;

PLASMA APPLICATIONS;

EID: 0031251508     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.649626     Document Type: Article

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