SCOPUS 정보 검색 플랫폼

Volumn 13, Issue 2, 1993, Pages 169-187

Fluid boundary layer effects in atmospheric-pressure plasma diamond film deposition

Author keywords

atomic carbon; chemical vapor deposition; diamond film; impinging jet; Thermal plasmas

Indexed keywords

ATMOSPHERIC PRESSURE; BOUNDARY LAYERS; FILMS; FLUID MECHANICS; HYDROGEN; METHANE; MOLYBDENUM; PLASMA DEVICES; PLASMAS; SUBSTRATES;

DIAMOND FILMS; PLASMA DIAMOND FILM DEPOSITION; RADIO FREQUENCY PLASMA REACTORS;

DIAMONDS;

EID: 0027611045 PISSN: 02724324 EISSN: 15728986 Source Type: Journal
DOI: 10.1007/BF01466040 Document Type: Article

Times cited : (59)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.