Performance analysis of a radio-frequency induction plasma generator using nonlinear state-space approach

IEEE Transactions on Plasma Science

Volumn 25, Issue 5, 1997, Pages 1023-1028

  Kim, Joseph ^a   Mostaghimi, Javad ^a   Iravani, Reza ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; ELECTRIC RESISTANCE; EQUIVALENT CIRCUITS; ITERATIVE METHODS; MATHEMATICAL MODELS; PLASMA SIMULATION; RESISTORS; STATE SPACE METHODS;

INDUCTION PLASMA GENERATORS;

PLASMA DEVICES;

EID: 0031250535     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.649621     Document Type: Article

References (14)

1. T. B. Reed, "Induction plasma torch," J. Appl. Phys., vol. 32, pp. 821-824, 1961.
2. J. Mostaghimi and M. I. Boulos, Inductively Coupled Plasmas in Analytical Atomic Spectrometry, A. Montaser and D. W. Golightly, Eds., 2nd ed. VCH, 1994, ch. 20, pp. 949-984.
3. M. I. Boulos and R. M. Barnes, Inductively Coupled Plasma Emission Spectroscopy, Part II, P. J. Boumans, Ed. New York: Wiley, 1987, ch. 9, pp. 289-352.
4. T. Yoshida, K. Nakagawa, T. Harada, and K. Akashi, "New design of a radio-frequency plasma torch," Plasma Chem. Plasma Process., vol. 1, pp. 113-829, 1981.
5. J. Mostaghimi, P. Proulx, and M. I. Boulos, "Computer modeling of the emission patterns for an ICP spectrochemical torch," Spectrochim. Acta B, At. Spectrosc., vol. 40, pp. 153-166, 1985.
6. P. Proulx, J. Mostaghimi, and M. I. Boulos, "Plasma-particle interaction effects in induction plasma modeling under dense loading conditions," Int. J. Heat Mass Trans., vol. 28, pp. 1327-1336, 1985.
7. J. Mostaghimi and M. I. Boulos, "Effect of frequency on local thermodynamic equilibrium in an inductively coupled plasma at atmospheric pressure," J. Appl. Phys., vol. 68, pp. 2643-2648, 1990.
8. T. Suekane, T. Taya, Y. Okuno, and S. Kabashima, "Numerical study of the nonequilibrium inductively coupled plasma with metal vapor ionization," IEEE Trans. Plasma Sei., vol. 24, pp. 1147-1154, June 1996.
9. M. Cai, A. Montaser, and J. Mostaghimi, "A two-temperature model for the simulation of atmospheric-pressure helium ICP's," Appl. Spectrosc. Part B, vol. 49, pp. 1390-1402, 1995.
10. J. Mostaghimi and M. I. Boulos, "Two-dimensional electromagnetic field effects in induction plasma modeling," Plasma Chem. Plasma Process, vol. 9, pp. 254, 1989.
11. A. Chentouf, J. Fouladgar, and G. Daveley, "A simplified method for calculation of the / impedance of an induction plasma," IEEE Trans. Mag., vol. 31, May 1995.
12. J. P. Ploteau et al., "Simulation numérique du fonctionnement d'un générateur d'induction haute fréquence," Electrimacs, Sept. 1996.
13. L. O. Chua and P. Lin, Computer-Aided Analysis of Electronic Circuits. Englewood Cliffs, NJ: Prentice-Hall, 1975, ch. 10, pp. 400-432.
14. F. W. Grover, Inductance Calculations. New York: Van Nostrand, 1946, pp. 95, 163.