New design of a radio-frequency plasma torch

Plasma Chemistry and Plasma Processing

Volumn 1, Issue 1, 1981, Pages 113-129

  Yoshida, Toyonobu ^a   Nakagawa, Kunihiko ^a   Harada, Toshiya ^a   Akashi, Kazuo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

injection method; Radio frequency plasma; temperature and flow fields

Indexed keywords

EID: 0000901139     PISSN: 02724324     EISSN: 15728986     Source Type: Journal    
DOI: 10.1007/BF00566379     Document Type: Article

References (20)