Evolution of the infra-red vibrational modes upon thermal oxidation of Si single crystals

Journal of Physics and Chemistry of Solids

Volumn 58, Issue 10, 1997, Pages 1497-1501

  Hirata, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

A. oxides; C. infra red spectroscopy; D. optical properties

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL BONDS; CRYSTAL ORIENTATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MOLECULAR VIBRATIONS; OPTICAL PROPERTIES; SINGLE CRYSTALS; THERMOOXIDATION;

BENDING VIBRATIONS; INFRARED ABSORPTION SPECTROSCOPY; ROCKING VIBRATIONS; STRETCHING VIBRATIONS;

SEMICONDUCTING SILICON;

EID: 0031249651     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3697(97)00179-0     Document Type: Article

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