SCOPUS 정보 검색 플랫폼

Materials Science and Engineering R: Reports

Volumn 20, Issue 4-5, 1997, Pages 167-280

Point defects and diffusion in thin films of GaAs

Author keywords

Dielectric cap; Diffusion mechanisms; Dopant solubility; Experimental design; Fermi energy pinning; Interdiffusion; Interstitial; Native point defect; Point defect solubility; Vacancy

Indexed keywords

ANNEALING; CRYSTAL IMPURITIES; FERMI LEVEL; INTERDIFFUSION (SOLIDS); PHASE DIAGRAMS; PHASE EQUILIBRIA; POINT DEFECTS; SEMICONDUCTOR DOPING; SOLUBILITY; THIN FILMS; VAPOR PHASE EPITAXY;

FERMI ENERGY PINNING;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0031248709 PISSN: 0927796X EISSN: None Source Type: Journal
DOI: 10.1016/S0927-796X(97)00007-7 Document Type: Review

Times cited : (51)

References (124)

1
- 0002694794
- D.G. Deppe, N. Holonyak, Jr., J. Appl. Phys. 64 (1988) R93.
- (1988) J. Appl. Phys. , vol.64
- Deppe, D.G.¹ Holonyak N., Jr.²

2
- 0041039191
- J.H. Crawford, L.M. Slifkin (eds), Plenum, New York
- H.C. Casey, Jr., G.L. Pearson, in: J.H. Crawford, L.M. Slifkin (eds), Point Defects in Solids, vol. 2, Plenum, New York, 1975, p. 163.
- (1975) Point Defects in Solids , vol.2 , pp. 163
- Casey H.C., Jr.¹ Pearson, G.L.²

3
- 0039260578
- R.K. Willardson, A.C. Beer (eds.), Academic Press, New York
- D.L. Kendall, in: R.K. Willardson, A.C. Beer (eds.), Semiconductors and Semimetals, vol. 4, Academic Press, New York, 1968, p. 222.
- (1968) Semiconductors and Semimetals , vol.4 , pp. 222
- Kendall, D.L.¹

4
- 69549145157
- D. Shaw (ed.), Plenum, New York
- D. Shaw, in: D. Shaw (ed.), Atomic Diffusion in Semiconductors, Plenum, New York, 1973, p. 1.
- (1973) Atomic Diffusion in Semiconductors , pp. 1
- Shaw, D.¹

5
- 0025786369
- T.Y. Tan, U. Gosele, S. Yu, Crit. Rev, Solid State Mater. Sci. 17 (1991) 47.
- (1991) Crit. Rev, Solid State Mater. Sci. , vol.17 , pp. 47
- Tan, T.Y.¹ Gosele, U.² Yu, S.³

6
- 0005560951
- R.M. Cohen, J. Appl. Phys. 67 (1990) 7268.
- (1990) J. Appl. Phys. , vol.67 , pp. 7268
- Cohen, R.M.¹

7
- 24244442963
- North-Holland, Amsterdam
- F.A. Kroger, The Chemistry of Imperfect Crystals, 2nd ed., vol. 2, North-Holland, Amsterdam, 1974, p. 237ff.
- (1974) The Chemistry of Imperfect Crystals, 2nd Ed. , vol.2
- Kroger, F.A.¹

8
- 0024056073
- T.Y. Tan, U. Gosele, Mater. Sci. Eng. B1 (1988) 47.
- (1988) Mater. Sci. Eng. , vol.B1 , pp. 47
- Tan, T.Y.¹ Gosele, U.²

9
- 30244485098
- J.R. Arthur, J. Phys. Chem. Solids 28 (1967) 2257.
- (1967) J. Phys. Chem. Solids , vol.28 , pp. 2257
- Arthur, J.R.¹

10
- 0005002125
- B.L. Olmsted. S.N. Houde-Walter, Appl. Phys. Lett. 63 (1993) 1131.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1131
- Olmsted, B.L.¹ Houde-Walter, S.N.²

11
- 0039409296
- M.B. Panish, J. Cryst. Growth 27 (1974) 6.
- (1974) J. Cryst. Growth , vol.27 , pp. 6
- Panish, M.B.¹

12
- 51249176654
- K.Y. Hsieh, Y.L. Hwang, J.H. Lee, R.M. Kolbas, J. Electron. Mater. 19 (1990) 1417.
- (1990) J. Electron. Mater. , vol.19 , pp. 1417
- Hsieh, K.Y.¹ Hwang, Y.L.² Lee, J.H.³ Kolbas, R.M.⁴

13
- 0040445324
- C.N. Cochran, L.M. Foster, J. Electrochem. Soc. 109 (1962) 149.
- (1962) J. Electrochem. Soc. , vol.109 , pp. 149
- Cochran, C.N.¹ Foster, L.M.²

14
- 0019030477
- C.D. Thurmond, G.P. Schwartz, G.W. Kammlott, B. Schwartz, J. Electrochem. Soc. 127 (1980) 1366.
- (1980) J. Electrochem. Soc. , vol.127 , pp. 1366
- Thurmond, C.D.¹ Schwartz, G.P.² Kammlott, G.W.³ Schwartz, B.⁴

15
- 0005580919
- O.R. Monteiro, J.W. Evans, J. Vac. Sci. Technol. A7 (1989) 49.
- (1989) J. Vac. Sci. Technol. , vol.A7 , pp. 49
- Monteiro, O.R.¹ Evans, J.W.²

16
- 0000544543
- G. Hughes, R. Ludeke, J. Vac. Sci. Technol. B4 (1986) 1109.
- (1986) J. Vac. Sci. Technol. , vol.B4 , pp. 1109
- Hughes, G.¹ Ludeke, R.²

17
- 0019625421
- H.D. Palfrey, M. Brown, A.F.W. Willoughby, J. Electrochem. Soc. 128 (1981) 2224.
- (1981) J. Electrochem. Soc. , vol.128 , pp. 2224
- Palfrey, H.D.¹ Brown, M.² Willoughby, A.F.W.³

18
- 0000927668
- J.M. Dallesasse, N. El-Zein, N. Holonyak, Jr., K.C. Hsieh, R.D. Burnham, R.D. Dupuis, J. Appl. Phys. 68 (1990) 2235.
- (1990) J. Appl. Phys. , vol.68 , pp. 2235
- Dallesasse, J.M.¹ El-Zein, N.² Holonyak N., Jr.³ Hsieh, K.C.⁴ Burnham, R.D.⁵ Dupuis, R.D.⁶

19
- 0028764159
- D.L. Huffacker, D.G. Deppe, K. Kumar, T.J. Rogers, Appl. Phys. Lett. 65 (1994) 97.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 97
- Huffacker, D.L.¹ Deppe, D.G.² Kumar, K.³ Rogers, T.J.⁴

20
- 0029358707
- M.J. Ries, N. Holonyak, Jr., E.I. Chen, S.A. Maranowski, M.R. Islam, A.L. Holmes, R.D. Dupuis, Appl. Phys. Lett. 67 (1995) 1107.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1107
- Ries, M.J.¹ Holonyak N., Jr.² Chen, E.I.³ Maranowski, S.A.⁴ Islam, M.R.⁵ Holmes, A.L.⁶ Dupuis, R.D.⁷

21
- 36449009670
- W.R. Reichert, C.Y. Chen, W.M. Li, J.E. Shield, R.M. Cohen, D.S. Simons, P.H. Chi, J. Appl. Phys. 77 (1995) 1902.
- (1995) J. Appl. Phys. , vol.77 , pp. 1902
- Reichert, W.R.¹ Chen, C.Y.² Li, W.M.³ Shield, J.E.⁴ Cohen, R.M.⁵ Simons, D.S.⁶ Chi, P.H.⁷

22
- 0041039193
- Ph.D. Thesis, University of Utah
- C.Y. Chen, Ph.D. Thesis, University of Utah, 1995.
- (1995)
- Chen, C.Y.¹

23
- 84916319973
- C.J. Frosch, L. Derick, J. Electrochem. Soc. 105 (1958) 695.
- (1958) J. Electrochem. Soc. , vol.105 , pp. 695
- Frosch, C.J.¹ Derick, L.²

24
- 0039260568
- D.W. Kisker, P.H. Fuoss, K.L. Tokuda, G. Renaud, S. Brennan, J.L. Kahn, Appl. Phys. Lett. 56 (1990) 2025.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2025
- Kisker, D.W.¹ Fuoss, P.H.² Tokuda, K.L.³ Renaud, G.⁴ Brennan, S.⁵ Kahn, J.L.⁶

25
- 0039260566
- Springer, New York
- F. Rosenberger, Fundamentals of Crystal Growth I, Springer, New York, 1979, p. 234.
- (1979) Fundamentals of Crystal Growth , vol.1 , pp. 234
- Rosenberger, F.¹

26
- 13044302201
- North-Holland, Amsterdam
- F.A. Kroger, The Chemistry of Imperfect Crystals, 2nd edn., vol. 2, North-Holland, Amsterdam, 1974, p. 145ff.
- (1974) The Chemistry of Imperfect Crystals, 2nd Edn. , vol.2
- Kroger, F.A.¹

27
- 0004020231
- Oxford University Press, London
- J. Crank, The Mathematics of Diffusion, 2nd edn., Oxford University Press, London, 1975.
- (1975) The Mathematics of Diffusion, 2nd Edn.
- Crank, J.¹

28
- 0004255385
- The Minerals, Metals, and Materials Society, Warrendale, PA
- Paul Shewmon, Diffusion in Solids, 2nd edn., The Minerals, Metals, and Materials Society, Warrendale, PA, 1989, p. 31.
- (1989) Diffusion in Solids, 2nd Edn. , pp. 31
- Shewmon, P.¹

29
- 0015742781
- S.M. Hu, Phys. Status Solidi B60 (1973) 595.
- (1973) Phys. Status Solidi , vol.B60 , pp. 595
- Hu, S.M.¹

30
- 0039852273
- R.W. Kaliski, D.W. Nam, D.G. Deppe, N. Holonyak, Jr., K.C. Hsieh, R.D. Burnham, J. Appl. Phys. 62 (1987) 998.
- (1987) J. Appl. Phys. , vol.62 , pp. 998
- Kaliski, R.W.¹ Nam, D.W.² Deppe, D.G.³ Holonyak N., Jr.⁴ Hsieh, K.C.⁵ Burnham, R.D.⁶

31
- 0039852270
- C.J. Nuese, G.E. Stillman, M.D. Sirkis, N. Holonyak, Jr., Solid State Electron. 9 (1966) 735.
- (1966) Solid State Electron. , vol.9 , pp. 735
- Nuese, C.J.¹ Stillman, G.E.² Sirkis, M.D.³ Holonyak N., Jr.⁴

32
- 0020847357
- Y. Matsumoto, Japan. J. Appl. Phys. 22 (1983) 1699.
- (1983) Japan. J. Appl. Phys. , vol.22 , pp. 1699
- Matsumoto, Y.¹

33
- 0019584251
- U. Gosele, F. Morehead, J. Appl. Phys. 52 (1981) 4617.
- (1981) J. Appl. Phys. , vol.52 , pp. 4617
- Gosele, U.¹ Morehead, F.²

34
- 51249173200
- R.M. Cohen, J. Electron. Mater. 20 (1991) 425.
- (1991) J. Electron. Mater. , vol.20 , pp. 425
- Cohen, R.M.¹

35
- 3042893108
- AIME
- H.C. Casey, Jr., M.B. Panish, Trans. Metall. Soc. AIME, 242 (1968) 406.
- (1968) Trans. Metall. Soc. , vol.242 , pp. 406
- Casey H.C., Jr.¹ Panish, M.B.²

36
- 0017022695
- K.K. Shih, J. Electrochem. Soc. 123 (1976) 1737.
- (1976) J. Electrochem. Soc. , vol.123 , pp. 1737
- Shih, K.K.¹

37
- 0039852269
- North-Holland, Amsterdam
- F.A. Kroger, The Chemistry of Imperfect Crystals, 2nd edn., vol. 1, North-Holland, Amsterdam, 1973, p. 246.
- (1973) The Chemistry of Imperfect Crystals, 2nd Edn. , vol.1 , pp. 246
- Kroger, F.A.¹

38
- 0001208988
- L.R. Weisberg, J. Blanc, Phys. Rev. 131 (1963) 1548.
- (1963) Phys. Rev. , vol.131 , pp. 1548
- Weisberg, L.R.¹ Blanc, J.²

39
- 0041039186
- H.C. Casey, Jr., M.B. Panish, L.L. Chang, Phys. Rev. 162 (1967) 660.
- (1967) Phys. Rev. , vol.162 , pp. 660
- Casey H.C., Jr.¹ Panish, M.B.² Chang, L.L.³

40
- 23544459548
- G.A. Baraff, M. Schluter, Phys. Rev. Lett. 55 (1985) 1327.
- (1985) Phys. Rev. Lett. , vol.55 , pp. 1327
- Baraff, G.A.¹ Schluter, M.²

41
- 0000673888
- T.Y.Tan, S. Yu, U. Gosele, J. Appl. Phys. 70 (1991) 4823.
- (1991) J. Appl. Phys. , vol.70 , pp. 4823
- Tan, T.Y.¹ Yu, S.² Gosele, U.³

42
- 0030565217
- C.Y. Chen, R.M. Cohen, J. Cryst. Growth 167 (1996) 17.
- (1996) J. Cryst. Growth , vol.167 , pp. 17
- Chen, C.Y.¹ Cohen, R.M.²

43
- 0001154966
- W. Jager, A. Rucki, K. Urban, H.G. Hettwer, N.A. Stolwijk, H. Mehrer, T.Y. Tan, J. Appl. Phys. 74 (1993) 4409.
- (1993) J. Appl. Phys. , vol.74 , pp. 4409
- Jager, W.¹ Rucki, A.² Urban, K.³ Hettwer, H.G.⁴ Stolwijk, N.A.⁵ Mehrer, H.⁶ Tan, T.Y.⁷

44
- 0000361031
- W. Shockley, J.T. Last, Phys. Rev. 107 (1957) 392.
- (1957) Phys. Rev. , vol.107 , pp. 392
- Shockley, W.¹ Last, J.T.²

45
- 0039260560
- personal communication
- D. Hurle, personal communication.
- Hurle, D.¹

46
- 0038613428
- S. Poykko, M.J. Puska, R.M. Nieminen, Phys. Rev. B 53 (1996) 3813.
- (1996) Phys. Rev. B , vol.53 , pp. 3813
- Poykko, S.¹ Puska, M.J.² Nieminen, R.M.³

47
- 0000564817
- H. Seong, L.J. Lewis, Phys. Rev. B 52 (1995) 5675.
- (1995) Phys. Rev. B , vol.52 , pp. 5675
- Seong, H.¹ Lewis, L.J.²

48
- 0005595530
- J. Dabrowski, J.E. Northrup, Phys. Rev. B 49 (1994) 14286.
- (1994) Phys. Rev. B , vol.49 , pp. 14286
- Dabrowski, J.¹ Northrup, J.E.²

49
- 30244446158
- J.E. Northrup, S.B. Zhang, Phys. Rev. B 50 (1994) 4962.
- (1994) Phys. Rev. B , vol.50 , pp. 4962
- Northrup, J.E.¹ Zhang, S.B.²

50
- 0001745014
- J.E. Northrup, S.B. Zhang, Phys. Rev. 647 (1993) 6791.
- (1993) Phys. Rev. , vol.647 , pp. 6791
- Northrup, J.E.¹ Zhang, S.B.²

51
- 12044249420
- S.B. Zhang, J.E. Northrup, Phys. Rev. Lett. 67 (1991) 2339.
- (1991) Phys. Rev. Lett. , vol.67 , pp. 2339
- Zhang, S.B.¹ Northrup, J.E.²

52
- 0001737910
- C. Wang, Q.M. Zhang, J. Bernholc, Phys. Rev. Lett. 69 (1992) 3789.
- (1992) Phys. Rev. Lett. , vol.69 , pp. 3789
- Wang, C.¹ Zhang, Q.M.² Bernholc, J.³

53
- 0040445240
- D.J. Lockwood (ed.), World Scientific, Singapore
- J. Bernholc, B. Chen, Q.M. Zhang, C. Wang, S.K. Kajihara, D. Sullivan, in: D.J. Lockwood (ed.), Proc. 22nd Conf. Phys. Semicond., World Scientific, Singapore, 1995, p. 2259.
- (1995) Proc. 22nd Conf. Phys. Semicond. , pp. 2259
- Bernholc, J.¹ Chen, B.² Zhang, Q.M.³ Wang, C.⁴ Kajihara, S.K.⁵ Sullivan, D.⁶

54
- 0029290986
- Y.M. Haddara, C.C. Lee, J.C. Hu, M.D. Deal, J.C. Bravman, MRS Bull. 20 (4) (1995) 41.
- (1995) MRS Bull. , vol.20 , Issue.4 , pp. 41
- Haddara, Y.M.¹ Lee, C.C.² Hu, J.C.³ Deal, M.D.⁴ Bravman, J.C.⁵

55
- 0029477516
- Defect- and Impurity-Engineered Semiconductors and Devices, S. Ashok, J. Chevallier, I. Akasaki, N.M. Johnson, B.L. Sopori (eds.), Materials Research Society, Pittsburgh, PA
- R.M. Cohen, C.Y. Chen, D.S. Simons, P.H. Chi, in Defect- and Impurity-Engineered Semiconductors and Devices, in: S. Ashok, J. Chevallier, I. Akasaki, N.M. Johnson, B.L. Sopori (eds.), Proc. 1995 MRS Meet., vol. 378, Materials Research Society, Pittsburgh, PA, 1995, p. 875.
- (1995) Proc. 1995 MRS Meet. , vol.378 , pp. 875
- Cohen, R.M.¹ Chen, C.Y.² Simons, D.S.³ Chi, P.H.⁴

56
- 0039852266
- K. Okamoto, H. Mawatari, K. Yamaguchi, A. Noguchi, J. Cryst. Growth 98 (1959) 530.
- (1959) J. Cryst. Growth , vol.98 , pp. 530
- Okamoto, K.¹ Mawatari, H.² Yamaguchi, K.³ Noguchi, A.⁴

57
- 0029540474
- W.M. Li, C.Y. Chen, R.M. Cohen, J. Cryst. Growth 156 (1995) 343.
- (1995) J. Cryst. Growth , vol.156 , pp. 343
- Li, W.M.¹ Chen, C.Y.² Cohen, R.M.³

58
- 0029633161
- G. Li, M. Linnarsson, C. Jagadish, J. Cryst. Growth 154 (1995) 231.
- (1995) J. Cryst. Growth , vol.154 , pp. 231
- Li, G.¹ Linnarsson, M.² Jagadish, C.³

59
- 0002740931
- H.C. Casey, Jr., M.B. Panish, J. Crystal Growth, 13-14, 818 (1972).
- (1972) J. Crystal Growth , vol.13-14 , pp. 818
- Casey H.C., Jr.¹ Panish, M.B.²

60
- 0006158119
- London
- K.H. Zschauer, A. Vogel, Proc. Symp. GaAs, 1970 Inst, of Physics, London, 1971, p. 100.
- (1971) Proc. Symp. GaAs, 1970 Inst, of Physics , pp. 100
- Zschauer, K.H.¹ Vogel, A.²

61
- 0001988459
- P.D. Kirchner, T.N. Jackson, G.D. Pettit, J.M. Woodall, Appl. Phys. Lett. 47 (1985) 26.
- (1985) Appl. Phys. Lett. , vol.47 , pp. 26
- Kirchner, P.D.¹ Jackson, T.N.² Pettit, G.D.³ Woodall, J.M.⁴

62
- 0000903973
- P. Enquist, J.A. Hutchby, T.J. de Lyons, J. Appl. Phys. 63 (1988) 4485.
- (1988) J. Appl. Phys. , vol.63 , pp. 4485
- Enquist, P.¹ Hutchby, J.A.² De Lyons, T.J.³

63
- 0024104141
- P.M. Enquist, J. Cryst. Growth 93 (1988) 637.
- (1988) J. Cryst. Growth , vol.93 , pp. 637
- Enquist, P.M.¹

64
- 33748016985
- W.S. Hobson, S.J. Pearton, A.S. Jordan, Appl. Phys. Lett. 56 (1990) 1251.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1251
- Hobson, W.S.¹ Pearton, S.J.² Jordan, A.S.³

65
- 0041039179
- D.G. Deppe, Appl. Phys. Lett. 56 (1990) 370.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 370
- Deppe, D.G.¹

66
- 0012491437
- C.Y. Chen, R.M. Cohen, D.S. Simons, P.H. Chi, Appl. Phys. Lett. 67 (1995) 1402.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1402
- Chen, C.Y.¹ Cohen, R.M.² Simons, D.S.³ Chi, P.H.⁴

67
- 36149019709
- B. Goldstein, Phys. Rev. 121 (1961) 1305.
- (1961) Phys. Rev. , vol.121 , pp. 1305
- Goldstein, B.¹

68
- 0001667440
- L. Wang, L. Hsu, E.E. Haller, J.W. Erickson, A. Fischer, K. Eberl, M. Cardona, Phys. Rev. Lett. 76 (1996) 2342.
- (1996) Phys. Rev. Lett. , vol.76 , pp. 2342
- Wang, L.¹ Hsu, L.² Haller, E.E.³ Erickson, J.W.⁴ Fischer, A.⁵ Eberl, K.⁶ Cardona, M.⁷

69
- 0001646740
- T.Y. Tan, H.M. You, S. Yu, U.M. Gosele, W. Jager, D.W. Boeringer, F. Zypman, R. Tsu, S.T. Lee, J. Appl. Phys. 72 (1992) 5206.
- (1992) J. Appl. Phys. , vol.72 , pp. 5206
- Tan, T.Y.¹ You, H.M.² Yu, S.³ Gosele, U.M.⁴ Jager, W.⁵ Boeringer, D.W.⁶ Zypman, F.⁷ Tsu, R.⁸ Lee, S.T.⁹

70
- 0023363789
- A. Furuya, M. Makiuchi, O. Wada, T. Fujii, H. Nobuhara, Jpn. J. Appl. Phys. 26, L926 (1987).
- (1987) Jpn. J. Appl. Phys. , vol.26
- Furuya, A.¹ Makiuchi, M.² Wada, O.³ Fujii, T.⁴ Nobuhara, H.⁵

71
- 36549094487
- L.J. Guido, N. Holonyak, Jr., K.C. Hsieh, R.W. Kaliski, W.E. Piano, R.D. Burnham, R.L. Thormon, J.E. Epler, T.L. Paoli, J. Appl. Phys. 61 (1987) 1372.
- (1987) J. Appl. Phys. , vol.61 , pp. 1372
- Guido, L.J.¹ Holonyak N., Jr.² Hsieh, K.C.³ Kaliski, R.W.⁴ Piano, W.E.⁵ Burnham, R.D.⁶ Thormon, R.L.⁷ Epler, J.E.⁸ Paoli, T.L.⁹

72
- 0039852258
- B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Leu. 60 (1992) 368.
- (1992) Appl. Phys. Leu. , vol.60 , pp. 368
- Olmsted, B.L.¹ Houde-Walter, S.N.²

73
- 0038270887
- B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 63 (1993) 530.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 530
- Olmsted, B.L.¹ Houde-Walter, S.N.²

74
- 0029343216
- N. Baba-Ali, I. Harrison, B. Tuck, J. Mater. Sci. Mater. Electron. 6 (1995) 127.
- (1995) J. Mater. Sci. Mater. Electron. , vol.6 , pp. 127
- Baba-Ali, N.¹ Harrison, I.² Tuck, B.³

75
- 0039260547
- S. Seshadri, L.J. Guido, P. Mitev, Appl. Phys. Lett. 67 (1995) 497.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 497
- Seshadri, S.¹ Guido, L.J.² Mitev, P.³

76
- 0039852261
- J.S. Harris (ed.)
- K.Y. Hsieh, Y.C. Lo, J.H. Lee, R.M. Kolbas, in: J.S. Harris (ed.), Gallium Arsenide and Related Compounds 1988, vol. 15, IOP, Atlanta, GA, 1988, p. 393, as taken from B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 60 (1992) 368.
- (1988) Gallium Arsenide and Related Compounds , vol.15
- Hsieh, K.Y.¹ Lo, Y.C.² Lee, J.H.³ Kolbas, R.M.⁴

77
- 0039260555
- Atlanta, GA
- K.Y. Hsieh, Y.C. Lo, J.H. Lee, R.M. Kolbas, in: J.S. Harris (ed.), Gallium Arsenide and Related Compounds 1988, vol. 15, IOP, Atlanta, GA, 1988, p. 393, as taken from B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 60 (1992) 368.
- (1988) IOP , pp. 393

78
- 0039852258
- K.Y. Hsieh, Y.C. Lo, J.H. Lee, R.M. Kolbas, in: J.S. Harris (ed.), Gallium Arsenide and Related Compounds 1988, vol. 15, IOP, Atlanta, GA, 1988, p. 393, as taken from B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 60 (1992) 368.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 368
- Olmsted, B.L.¹ Houde-Walter, S.N.²

79
- 0041039178
- J.S. Harris (ed.)
- L.J. Guido, N. Holonyak, Jr., K.C. Hsieh, in: J.S. Harris (ed.), Gallium Arsenide and Related Compounds 1988, vol. 15, IOP, Atlanta, GA, 1988, p. 353, as taken from B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 60 (1992) 368.
- (1988) Gallium Arsenide and Related Compounds , vol.15
- Guido, L.J.¹ Holonyak N., Jr.² Hsieh, K.C.³

80
- 0039260554
- Atlanta, GA
- L.J. Guido, N. Holonyak, Jr., K.C. Hsieh, in: J.S. Harris (ed.), Gallium Arsenide and Related Compounds 1988, vol. 15, IOP, Atlanta, GA, 1988, p. 353, as taken from B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 60 (1992) 368.
- (1988) IOP , pp. 353

81
- 0039852258
- L.J. Guido, N. Holonyak, Jr., K.C. Hsieh, in: J.S. Harris (ed.), Gallium Arsenide and Related Compounds 1988, vol. 15, IOP, Atlanta, GA, 1988, p. 353, as taken from B.L. Olmsted, S.N. Houde-Walter, Appl. Phys. Lett. 60 (1992) 368.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 368
- Olmsted, B.L.¹ Houde-Walter, S.N.²

82
- 0039852265
- personal communication
- B.L. Olmsted, S. Houde-Walter, personal communication 1996.
- (1996)
- Olmsted, B.L.¹ Houde-Walter, S.²

83
- 0008729540
- P. Mei, H.W. Yoon, T. Venkatesan, S.A. Schwarz, J.P. Harbison, Appl. Phys. Lett. 50 (1987) 1823.
- (1987) Appl. Phys. Lett. , vol.50 , pp. 1823
- Mei, P.¹ Yoon, H.W.² Venkatesan, T.³ Schwarz, S.A.⁴ Harbison, J.P.⁵

84
- 0017516712
- P.M. Petroff, J. Vac. Sci. Technol. 14 (1977) 973.
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 973
- Petroff, P.M.¹

85
- 0018812396
- R.M. Fleming, D.B. McWhan, A.C. Gossard, W. Wiegmann, R.A. Logan, J. Appl. Phys. 51 (1980) 357.
- (1980) J. Appl. Phys. , vol.51 , pp. 357
- Fleming, R.M.¹ McWhan, D.B.² Gossard, A.C.³ Wiegmann, W.⁴ Logan, R.A.⁵

86
- 21544452320
- J. Cibert, P.M. Petroff, D.J. Werder, S.J. Pearton, A.C. Gossard, J.H. English, Appl. Phys. Lett. 49 (1986) 223.
- (1986) Appl. Phys. Lett. , vol.49 , pp. 223
- Cibert, J.¹ Petroff, P.M.² Werder, D.J.³ Pearton, S.J.⁴ Gossard, A.C.⁵ English, J.H.⁶

87
- 0040445232
- T.E. Schlesinger, T. Kuech, Appl. Phys. Lett. 49 (1986) 518.
- (1986) Appl. Phys. Lett. , vol.49 , pp. 518
- Schlesinger, T.E.¹ Kuech, T.²

88
- 0019931988
- W. Blakemore, J. Appl. Phys. 53 (1982) 520.
- (1982) J. Appl. Phys. , vol.53 , pp. 520
- Blakemore, W.¹

89
- 0028764159
- D.L. Huffaker, D.G. Deppe, K. Kumar, T.J. Rogers, Appl. Phys, Lett. 65 (1994) 97.
- (1994) Appl. Phys, Lett. , vol.65 , pp. 97
- Huffaker, D.L.¹ Deppe, D.G.² Kumar, K.³ Rogers, T.J.⁴

90
- 0000705999
- T.Y. Tan, H.M. You, U.M. Gosele, Appl. Phys. A56 (1993) 249.
- (1993) Appl. Phys. , vol.A56 , pp. 249
- Tan, T.Y.¹ You, H.M.² Gosele, U.M.³

91
- 0006460875
- P. Mei, S.A. Schwarz, T. Venkatesan, C.L. Schwartz, E. Colas, J. Appl. Phys. 65 (1989) 2165.
- (1989) J. Appl. Phys. , vol.65 , pp. 2165
- Mei, P.¹ Schwarz, S.A.² Venkatesan, T.³ Schwartz, C.L.⁴ Colas, E.⁵

92
- 0029507578
- S. Ashok, J. Chevallier, I. Akasaki, N.M. Johnson, B.L. Sopori (eds.), Materials Research Society, Pittsburgh, PA
- R.M. Cohen, C.Y. Chen, D.S. Simons, P.H. Chi, in: S. Ashok, J. Chevallier, I. Akasaki, N.M. Johnson, B.L. Sopori (eds.), Defectand Impurity-Engineered Semiconductors and Devices, Proc. 1995 MRS Meet., vol. 378, Materials Research Society, Pittsburgh, PA, 1995, p. 959.
- (1995) Defectand Impurity-Engineered Semiconductors and Devices, Proc. 1995 MRS Meet. , vol.378 , pp. 959
- Cohen, R.M.¹ Chen, C.Y.² Simons, D.S.³ Chi, P.H.⁴

93
- 0041039170
- W.M. Li, R.M. Cohen, D.S. Simons, P.H. Chi, Appl, Phys. Lett. 70 (1997) 3392,
- (1997) Appl, Phys. Lett. , vol.70 , pp. 3392
- Li, W.M.¹ Cohen, R.M.² Simons, D.S.³ Chi, P.H.⁴

94
- 51249176884
- I. Szafranek, M. Szafranek, J.S. Major, Jr., B.T. Cunningham, L.J. Guido, N. Holonyak, Jr., G.E. Stillman, J. Electronic Mater. 20 (1991) 409.
- (1991) J. Electronic Mater. , vol.20 , pp. 409
- Szafranek, I.¹ Szafranek, M.² Major J.S., Jr.³ Cunningham, B.T.⁴ Guido, L.J.⁵ Holonyak N., Jr.⁶ Stillman, G.E.⁷

95
- 0000165303
- H.M. You, T.Y. Tan, U.M. Gosele, S.T. Lee, G.E. Hofler, K.C. Hsieh, N. Holonyak, Jr., J. Appl. Phys. 74 (1993) 2450.
- (1993) J. Appl. Phys. , vol.74 , pp. 2450
- You, H.M.¹ Tan, T.Y.² Gosele, U.M.³ Lee, S.T.⁴ Hofler, G.E.⁵ Hsieh, K.C.⁶ Holonyak N., Jr.⁷

96
- 0015068012
- C.H. Ting, G.L. Pearson, J. Appl. Phys. 42 (1971) 2247.
- (1971) J. Appl. Phys. , vol.42 , pp. 2247
- Ting, C.H.¹ Pearson, G.L.²

97
- 0000389652
- L.L. Chang, G.L. Pearson, J. Appl. Phys. 35 (1964) 1960.
- (1964) J. Appl. Phys. , vol.35 , pp. 1960
- Chang, L.L.¹ Pearson, G.L.²

98
- 0041039167
- M.A.H. Kadhim, B. Tuck, J. Mater. Sci. 7 (1972) 68.
- (1972) J. Mater. Sci. , vol.7 , pp. 68
- Kadhim, M.A.H.¹ Tuck, B.²

99
- 36449006719
- S. Yu, T.Y. Tan, U. Gosele, J. Appl. Phys. 69 (1991) 3547.
- (1991) J. Appl. Phys. , vol.69 , pp. 3547
- Yu, S.¹ Tan, T.Y.² Gosele, U.³

100
- 0000999874
- R.L. Longini, Solid State Electron. 5 (1962) 127.
- (1962) Solid State Electron. , vol.5 , pp. 127
- Longini, R.L.¹

101
- 0001314126
- L.L. Chang, A. Koma, Appl. Phys. Lett. 29 (1976) 138.
- (1976) Appl. Phys. Lett. , vol.29 , pp. 138
- Chang, L.L.¹ Koma, A.²

102
- 0020828725
- M.D. Camras, N. Holonyak, Jr., R.D. Burnham, W. Streifer, D.R. Scifres, T.L. Paoli, C. Lindstrom, J. Appl, Phys. 54 (1983) 5637.
- (1983) J. Appl, Phys. , vol.54 , pp. 5637
- Camras, M.D.¹ Holonyak N., Jr.² Burnham, R.D.³ Streifer, W.⁴ Scifres, D.R.⁵ Paoli, T.L.⁶ Lindstrom, C.⁷

103
- 0039260548
- personal communication
- B. Olmsted, S. Houde-Walter, personal communication 1996.
- (1996)
- Olmsted, B.¹ Houde-Walter, S.²

104
- 51249164616
- S. Seshadri, L.J. Guido, T.S. Moise, J.C. Beggy, T.J. Cunningham, R.C. Barker, J. Electronic Mater. 21 (1992) 33.
- (1992) J. Electronic Mater. , vol.21 , pp. 33
- Seshadri, S.¹ Guido, L.J.² Moise, T.S.³ Beggy, J.C.⁴ Cunningham, T.J.⁵ Barker, R.C.⁶

105
- 36449007219
- K.J. Beernink, D. Sun, D.W. Treat, B.P. Bour, Appl. Phys. Lett. 66 (1995) 3597.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3597
- Beernink, K.J.¹ Sun, D.² Treat, D.W.³ Bour, B.P.⁴

106
- 0040445214
- N. Baba-Ali, I. Harrison, B. Tuck, H.P. Ho, M. Henini, O.H. Hughes, J. Mater. Sci. Mater. Electron. 1 (1990) 133.
- (1990) J. Mater. Sci. Mater. Electron. , vol.1 , pp. 133
- Baba-Ali, N.¹ Harrison, I.² Tuck, B.³ Ho, H.P.⁴ Henini, M.⁵ Hughes, O.H.⁶

107
- 0040445226
- W.P. Gillin, I.V. Bradley, L.K. Howard, R. Gwilliam, K.P. Homewood, J. Appl. Phys. 73 (1993) 7715.
- (1993) J. Appl. Phys. , vol.73 , pp. 7715
- Gillin, W.P.¹ Bradley, I.V.² Howard, L.K.³ Gwilliam, R.⁴ Homewood, K.P.⁵

108
- 0342816535
- Y.M. Haddara, M.D. Deal, J.C. Bravman, Appl. Phys. Lett. 68 (1996) 1939.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1939
- Haddara, Y.M.¹ Deal, M.D.² Bravman, J.C.³

109
- 0039260546
- Electrochemical Society, Pennington, NJ
- Y.M. Haddara, M.D. Deal, H.G. Robinson, J.C. Bravman, Proc. SOTAPOCSXXI, Electrochemical Society, Pennington, NJ, 1995, p. 96.
- (1995) Proc. SOTAPOCSXXI , pp. 96
- Haddara, Y.M.¹ Deal, M.D.² Robinson, H.G.³ Bravman, J.C.⁴

110
- 0039852249
- Electrochemical Society, Pennington, NJ
- Y.M. Haddara, M.D. Deal, J.C. Bravman, in Proc. 4th Int. Symp. Process Physics and Modeling, Electrochemical Society, Pennington, NJ, 1996, p. 142.
- (1996) Proc. 4th Int. Symp. Process Physics and Modeling , pp. 142
- Haddara, Y.M.¹ Deal, M.D.² Bravman, J.C.³

111
- 0041039160
- W.J. Taylor, N. Kuwata, I. Yoshida, T. Katsuyama, H. Hayashi, J. Appl. Phys. 73 (1993) 8653.
- (1993) J. Appl. Phys. , vol.73 , pp. 8653
- Taylor, W.J.¹ Kuwata, N.² Yoshida, I.³ Katsuyama, T.⁴ Hayashi, H.⁵

112
- 36449005345
- W.P. Gillin, D.J. Dunstan, K.P. Homewood, L.K. Howard, B.J. Sealy, J. Appl. Phys. 73 (1993) 3782.
- (1993) J. Appl. Phys. , vol.73 , pp. 3782
- Gillin, W.P.¹ Dunstan, D.J.² Homewood, K.P.³ Howard, L.K.⁴ Sealy, B.J.⁵

113
- 0002140447
- I.V. Bradley, W.P. Gillin, K.P. Homewood, R.P. Webb, J. Appl. Phys. 73 (1993) 1686.
- (1993) J. Appl. Phys. , vol.73 , pp. 1686
- Bradley, I.V.¹ Gillin, W.P.² Homewood, K.P.³ Webb, R.P.⁴

114
- 33751126817
- W.J. Choi, S. Lee, J. Zhang, Y. Kim, S.K. Kim, J.I. Lee, K.N. Kang, K. Cho, Jpn. J. Appl. Phys. 34, L418 (1995).
- (1995) Jpn. J. Appl. Phys. , vol.34
- Choi, W.J.¹ Lee, S.² Zhang, J.³ Kim, Y.⁴ Kim, S.K.⁵ Lee, J.I.⁶ Kang, K.N.⁷ Cho, K.⁸

115
- 36449002401
- K.J. Beernink, R.L. Thornton, G.B. Anderson, M.A. Emanuel, Appl. Phys. Lett. 66 (1995) 2522.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2522
- Beernink, K.J.¹ Thornton, R.L.² Anderson, G.B.³ Emanuel, M.A.⁴

116
- 0005246769
- J.D. Ralston, M. Ramsteiner, B. Dischler, M. Maier, G. Brandt, P. Koidl, D.J. As, J. Appl. Phys. 70 (1991) 2195.
- (1991) J. Appl. Phys. , vol.70 , pp. 2195
- Ralston, J.D.¹ Ramsteiner, M.² Dischler, B.³ Maier, M.⁴ Brandt, G.⁵ Koidl, P.⁶ As, D.J.⁷

117
- 0039852247
- J.S. Major, Jr., F.A. Kish, T.A. Richard, A.R. Sugg, J.E. Baker, N. Holonyak, Jr., J. Appl. Phys. 68 (1990) 6199.
- (1990) J. Appl. Phys. , vol.68 , pp. 6199
- Major J.S., Jr.¹ Kish, F.A.² Richard, T.A.³ Sugg, A.R.⁴ Baker, J.E.⁵ Holonyak N., Jr.⁶

118
- 0001121464
- J.C. Lee, T.E. Schlesinger, T.F. Kuech, J. Vac. Sci. Technol. B5 (1987) 1187.
- (1987) J. Vac. Sci. Technol. , vol.B5 , pp. 1187
- Lee, J.C.¹ Schlesinger, T.E.² Kuech, T.F.³

119
- 0027698196
- W.P. Gillin, I.V. Bradley, S.S. Rao, K.P. Homewood, B.J. Sealy, L.K. Howard, A.D. Smith, A.T.R. Briggs, Mater. Sci. Eng. B21 (1993) 281.
- (1993) Mater. Sci. Eng. , vol.B21 , pp. 281
- Gillin, W.P.¹ Bradley, I.V.² Rao, S.S.³ Homewood, K.P.⁴ Sealy, B.J.⁵ Howard, L.K.⁶ Smith, A.D.⁷ Briggs, A.T.R.⁸

120
- 0039260539
- personal communication
- W. Gillin, personal communication 1996.
- (1996)
- Gillin, W.¹

121
- 0039260540
- R.K. Kupka, Y. Chen, Appl. Phys. Lett. 67 (1995) 1612.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1612
- Kupka, R.K.¹ Chen, Y.²

122
- 0029343664
- S. Burkner, M. Maier, E.C. Larkins, W. Rothemund, E.P. O'Reilly, J.D. Ralston, J. Electronic Mater, 24 (1995) 805.
- (1995) J. Electronic Mater , vol.24 , pp. 805
- Burkner, S.¹ Maier, M.² Larkins, E.C.³ Rothemund, W.⁴ O'Reilly, E.P.⁵ Ralston, J.D.⁶

123
- 3643122785
- J.D. Ralston, S. O'Brien, G.W. Wicks, L.F. Eastman, Appl. Phys. Lett. 52 (1988) 1511.
- (1988) Appl. Phys. Lett. , vol.52 , pp. 1511
- Ralston, J.D.¹ O'Brien, S.² Wicks, G.W.³ Eastman, L.F.⁴

124
- 0028427846
- I. Gontijo, T. Krauss, J.H. Marsh, R.M. De La Rue, IEEE J. Quantum Electron. 30 (1994) 1189.
- (1994) IEEE J. Quantum Electron. , vol.30 , pp. 1189
- Gontijo, I.¹ Krauss, T.² Marsh, J.H.³ De La Rue, R.M.⁴

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