MMIC in-circuit and in-device testing with an on-wafer high frequency electric force microscope test system

Microelectronics Reliability

Volumn 37, Issue 10-11, 1997, Pages 1575-1578

  Leyk, A ^a   Van Waasen, S ^a   Tegude, F J ^a   Kubalek, E ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT TESTING; MICROSCOPIC EXAMINATION; SEMICONDUCTOR DEVICE TESTING;

HIGH FREQUENCY ELECTRIC FORCE MICROSCOPE; TOPOGRAPHIC IMAGING; TRAVELING WAVE AMPLIFIER;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0031247420     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00113-3     Document Type: Article

References (10)

1. W. Mertin, Microelectronic Engineering 31, 365-376, 1996 (see listed references)
2. J. Fehr, H. Sinnwell, L.J. Balk, E. Kubalek, Microelec. Engineering, No. 16, 1-4, 1992
3. T.P. Budka and G.M. Rebeiz, IEEE MTT-S Digest, 1139-1142, 1995
4. B. Courtois, in: TIMA Laboratories, Centre National de la Recherche Scientifique, 1993
5. R. Majidi-Ahy et. al., IEEE Trans. Microw. Theory Tech., 38, No. 12, 1986-1993, 1990
6. J. Kölzer, J. Otto, IEEE Design & Test of Computers, 39-51, December 1991
7. A.S. Hou, F. Ho, D.M. Bloom, Electron. Lett., Vol. 28, No.25, 2302-2303, 1992
8. A. Leyk and E. Kubalek, to be published in: IEEE Trans. on Instrum, and Measurement
9. A. Leyk and E. Kubalek, Microelec. Engineering 31, 187-194, 1996
10. S. van Waasen, G. Jansen, K.M. Bertenburg, R. Reuter, F.J. Tegude, Proc. Conference on Indium Phosphide and Related Materials, 642-645, 1996