Two-dimensional measurements of microwave voltage-amplitude and phase distributions within a monolithic integrated interdigital capacitor with a high frequency scanning force microscope test system

Microelectronic Engineering

Volumn 31, Issue 1-4, 1996, Pages 187-194

  Leyk, A ^a   Kubalek, E ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; FAILURE ANALYSIS; IMAGING TECHNIQUES; MICROSCOPES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; VOLTAGE DISTRIBUTION MEASUREMENT;

MICROWAVE VOLTAGE AMPLITUDE DISTRIBUTION; MICROWAVE VOLTAGE PHASE DISTRIBUTION; PHASE DISTRIBUTION; SCANNING FORCE MICROSCOPE; TOPOGRAPHIC IMAGING;

ELECTRIC VARIABLES MEASUREMENT;

EID: 0030082353     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00342-8     Document Type: Article

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