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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 10, 1997, Pages 6221-6225

Structural analysis of cubic GaN through X-ray pole figure generation

(6) Balakrishnan, Krishnan a Feuillet, Guy a,d Ohta, Kazuo b,e Hamaguchi, Hiroshi c Okumura, Hajime a Yoshida, Sadafumi a

a ELECTROTECHNICAL LABORATORY (Japan)

b SHIBAURA INSTITUTE OF TECHNOLOGY (Japan)

c TOKYO UNIVERSITY OF SCIENCE (Japan)

d CEA GRENOBLE (France)

e SONY CORPORATION (Japan)

Author keywords

GaN; Pole figure; Secondary hexagonal phase; X ray diffraction

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON CYCLOTRON RESONANCE; MOLECULAR BEAM EPITAXY; NITROGEN; PLASMA SOURCES; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; X RAY CRYSTALLOGRAPHY;

GALLIUM NITRIDE; X RAY POLE FIGURES;

SEMICONDUCTING FILMS;

EID: 0031246604 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.6221 Document Type: Article

Times cited : (38)

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