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Physica Status Solidi (A) Applied Research

Volumn 163, Issue 2, 1997, Pages

Fast deposition of μc-Si:H by restrictive dilution and enhanced HF-power

(6) Torres, P a Keppner, H a Meier, J a Kroll, U a Beck, N a Shah, A a

a UNIVERSITY OF NEUCHÂTEL (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; CRYSTALLIZATION; DEPOSITION; ENERGY CONVERSION; ENERGY EFFICIENCY; GLOW DISCHARGES; HYDROGENATION; MORPHOLOGY; PHOTOVOLTAIC CELLS; SOLAR CELLS;

VERY HIGH FREQUENCY GLOW DISCHARGE DEPOSITION;

SEMICONDUCTING SILICON;

EID: 0031246379 PISSN: 00318965 EISSN: None Source Type: Journal
DOI: 10.1002/1521-396X(199710)163:23.0.CO;2-7 Document Type: Article

Times cited : (21)

References (7)

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