Polarization quadrature measurement of subwavelength diffracting structures

Applied Optics

Volumn 36, Issue 25, 1997, Pages 6434-6440

  Marx, D S ^a,b   Psaltis, D ^a  

^a California Institute of Technology   (United States)

^b Sight Systems Inc   (United States)

Author keywords

Metrology; Optical disk memories; Scatterometry; Vector diffraction

Indexed keywords

COMPUTER SIMULATION; DIFFRACTION GRATINGS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; INTEGRATION; LIGHT POLARIZATION; LIGHT REFLECTION; OPTICAL DISK STORAGE; OPTICAL VARIABLES MEASUREMENT; OPTICAL WAVEGUIDES; PHOTODETECTORS;

ELECTROMAGNETIC NUMERICAL SIMULATION; POLARIZATION QUADRATURE MEASUREMENT; SCATTEROMETRY; VECTOR DIFFRACTION;

ELECTROMAGNETIC WAVE DIFFRACTION;

EID: 0031238020     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.006434     Document Type: Article

References (11)

1. C. J. Raymond, M. R. Murnane, S. L. Prins, S. S. H. Naqvi, J. R. McNeil, and J. W. Hosch, “Multi-parameter CD measurements using scatterometry, ” in Metrology, Inspection, and Process Control for Microlithography X, S. K. Jones, ed., Proc. SPIE 2725, 698-709 (1996).
2. C. J. Raymond, S. S. H. Naqvi, and J. R. McNeil, “Scatterometry for CD measurements of etched structures, ” in Metrology, Inspection, and Process Control for Microlithography X, S. K. Jones, ed., Proc. SPIE 2725, 720-728 (1996).
3. Toshiba Digital Video Disc Brochure (Toshiba Corporation, 1995).
4. J. G. Dil and B. A. Jacobs, “Apparent size of reflecting polygonal obstacles of the order of one wavelength, ” J. Opt. Soc. Am. 69, 950-960 (1979).
5. Y. Kok and N. C. Gallagher, “Relative phases of electromagnetic waves diffracted by a perfectly conducting rectangular-grooved grating, ” J. Opt. Soc. Am. A 5, 65-73 (1988).
6. D. S. Marx and D. Psaltis, “Optical diffraction of focused spots and subwavelength structures, ” J. Opt. Soc. Am. A 14, 1268-1278 (1997).
7. Pasman P., “Vector theory of diffraction, ” in Principles of Optical Disc Systems (Hilger, London, 1985), Chap. 3.
8. H. Haidner, J. T. Sheridan, J. Schwider, and N. Streibl, “Design of a blazed grating consisting of metallic subwavelength binary grooves, ” Opt. Commun. 98, 5-10 (1993).
9. G. Sirat and D. Psaltis, “Conoscopic holography, ” Opt. Lett. 10, 4-6 (1985).
10. G. Sirat and D. Psaltis, “Conoscopic holograms, ” Opt. Commun. 65, 243-249 (1988).
11. J. P. Wu and J. L. White, “Study of birefringence character of injection and compression-molded polycarbonate and its interpretation, ” Polym. Eng. Sci. 31, 652-660 (1991).