Multiparameter CD measurements using scatterometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 698-709

  Raymond, Christopher J ^a   Murnane, Michael R ^a   Prins, Steven L ^a   Naqvi, S Sohail H ^a   McNeil, John R ^a   Hosch, Jimmy W ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSIONS; MULTIPARAMETER MEASUREMENTS;

DIFFRACTION; DISTANCE MEASUREMENT; ELLIPSOMETRY; INSPECTION; MICROELECTRONICS; SCANNING ELECTRON MICROSCOPY;

LIGHT SCATTERING;

EID: 0029728527     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)