Growth mechanisms of mixed oxides on alumina

Applied Surface Science

Volumn 112, Issue , 1997, Pages 23-29

  Haukka, Suvi ^a   Lindblad, Marina ^a   Suntola, Tuomo ^a  

^a Microchemistry Limited   (Finland)

Author keywords

Atomic layer epitaxy (ALE); High surface area alumina; Metal beta diketonate; Mixed oxide

Indexed keywords

ALUMINA; ATOMS; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LANTHANUM COMPOUNDS; MAGNESIUM COMPOUNDS; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY; STABILITY; SURFACE MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

ATOMIC LAYER EPITAXY; METAL BETA DIKETONATE; SURFACE AREA;

EPITAXIAL GROWTH;

EID: 0031547020     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00979-8     Document Type: Article

References (19)

1. T. Suntola, in: Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanics and Dynamics, Atomic Layer Epitaxy, ed. D.T.J. Hurle (Elsevier Science B.V., 1994) p. 601.
2. E.-L. Lakomaa, Appl. Surf. Sci. 75 (1994) 185.
3. S. Haukka, A. Kytökivi, E.-L. Lakomaa, U. Lehtovirta, M. Lindblad, V. Lujala and T. Suntola, in: Proc. 6th Int. Symp. on Scientific Basis for the Preparation of Heterogenous Catalysts, Preparation of Catalysts VI, Eds. G. Poncelet et al. (Elsevier Science B.V., 1995) p. 957.
4. J. Aarik, A. Aidla, A. Jaek, M. Leskelä and L. Niinistö, Appl. Surf. Sci. 75 (1994) 33.
5. M. Lindblad, L. Lindfors and T. Suntola, Catal. Lett. 27 (1994) 323.
6. S. Haukka, E.-L. Lakomaa and T. Suntola, Appl. Surf. Sci. 82-83 (1994) 548.
7. M. Leskelä and L. Niinistö, in: Atomic Layer Epitaxy, eds. T. Suntola and M. Simpson (Blackie, London, 1990) p. 1.
8. L. Niinistö, M. Ritala and L. Leskelä, Mater. Sci. Eng. (1996), in press.
9. A. Kytökivi, J.-P. Jacobs, A. Hakuli, J. Meriläinen and H.H. Brongersma, J. Catal. 162 (1996) 190.
10. S. Haukka, E.-L. Lakomaa, O. Jylhä, J. Vilhunen and S. Hornytzkyj, Langmuir 9 (1993) 3497.
11. S. Haukka, A. Kytökivi and A. Rautiainen, to be published.
12. S. Haukka, E.-L. Lakomaa and T. Suntola, Appl. Surf. Sci. 75 (1994) 220.
13. A. Kytökivi, M. Lindblad and A. Root, J. Chem. Soc. Faraday Trans. 91 (1995) 941.
14. T. Suntola, Appl. Surf. Sci. 100-101 (1996) 391.
15. N. P. Kuz'mina, G.A. Tsirkov, A. S. Alikhanyan, I.P. Malkerova, L.I. Martynenko and I. V. Tkachenko, Russ. J. Inorg. Chem. 39 (1994) 1218.
16. R. Sekine, M. Kawai, T. Hikita and T. Hanada, Surf. Sci. 242 (1991) 508.
17. J. Aarik, A. Aidla, A. Jaek, M. Leskelä and L. Niinistö, J. Mater. Chem. 4 (1994) 1239.
18. F. Rousseau, A. Jain, T. Kodas, M. Hampden-Smith, J. Doug Farr and R. Muenchausen, J. Mater. Chem. 2 (1992) 893.
19. P. Soininen, E. Nykänen, L. Niinistö and M. Leskelä, Chem. Vap. Deposition 2 (1996) 69.