Influence of nitrogen doping on different properties of a-C:H

Thin Solid Films

Volumn 268, Issue 1-2, 1995, Pages 22-29

  Hauert, R ^a   Glisenti, A ^a   Metin, S ^a   Goitia, J ^a   Kaufman, J H ^a   van Loosdrecht, P H M ^a   Kellock, A J ^a   Hoffmann, P ^a   White, R L ^b   Hermsmeier, B D ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM   (United States)

Author keywords

Amorphous materials; Carbon; Doping; Nitrogen

Indexed keywords

AMORPHOUS MATERIALS; CARBON; DOPING (ADDITIVES); FRICTION; HARDNESS; HYDROGEN; INTERFACIAL ENERGY; NITROGEN; RESIDUAL STRESSES; THERMAL CONDUCTIVITY; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON; NITROGEN DOPING;

THIN FILMS;

EID: 0029410313     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)06824-4     Document Type: Article

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