Structure of inductively coupled plasma with metal vapor ionization

IEEE Transactions on Plasma Science

Volumn 25, Issue 4, 1997, Pages 769-775

  Murakami, Tomoyuki ^a   Okuno, Yoshihiro ^a   Kabashima, Shigeharu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Full seed ionization; Inductively coupled plasma

Indexed keywords

ARGON; CESIUM; COMPUTER SIMULATION; ELECTRIC COILS; ELECTRIC FIELD EFFECTS; IONIZATION OF GASES; MATHEMATICAL MODELS; PLASMA DENSITY; VECTORS;

FULLY IONIZED SEED (FIS) PLASMAS; INDUCTIVELY COUPLED PLASMA;

PLASMAS;

EID: 0031210651     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.640702     Document Type: Article

References (13)

1. D. B. Graves, Plasma processing, IEEE Trans. Plasma Sci., vol. 22, no. 1, pp. 31-12, 1994.
2. J. R. Roth, Industrial Plasma Engineering. Bristol and Philadelphia: Institute of Physics, 1995.
3. J. Mostaghimi and M. I. Boulos, Two-dimensional electromagnetic field effects in induction plasma modeling, Plasma Chem. Plasma Process., vol. 9, no. 1, pp. 25-44, 1989.
4. _, Effect of frequency on local thermodynamic equilibrium conditions in an inductively coupled argon plasma at atmospheric pressure, J. Appl. Phys., vol. 68, no. 6, pp. 2643-2648, 1990.
5. R. J. Rosa, Magnetohydrodynamic Energy Conversion. New York: McGraw-Hill, 1968.
6. M. E. Talaat, A two-electron group model theory for radio-frequency ionization of noble gases with turbulent flow, IEEE Trans. Plasma Sci., vol. 19, no. 2, pp. 176-188, 1991.
7. T. Nakamura and W. Riedmüller, Stability of nonequilibrium MHD plasma in the region of fully ionized seed, AIAA J., vol. 12, no. 3, pp. 661-668, 1974.
8. T. Suekane, T. Taya, Y. Okuno, and S. Kabashima, Numerical studies on the nonequilibrium inductively coupled plasma with metal vapor ionization, IEEE Trans. Plasma Sci., vol. 24, no. 3, pp. 1147-1154, 1996.
9. C. L. Chen, Absorption coefficients for the wings of the first two resonance doublets of cesium broadened by argon, Phys. Rev. A, vol. 7, 1973.
10. J. M. Watzer, Electron density determination in argon cesium MHD-plasmas, Physica, vol. 123C, pp. 247-256, 1984.
11. M. Mitchner and C. H. Kruger, Partially Ionized Gases. New York: Wiley, 1973.
12. F.F. Chen, Introduction to Plasma Physics and Controlled Fusion, Vol. 1, Plasma Physics, 2nd ed. New York: Plenum, 1984, pp. 292-294.
13. R. A. Stewart, P. Vitello, and D. B. Graves, Two-dimensional fluid model of high density inductively coupled plasma sources, J. Vac. Sci. Technol., vol. B12, no. 1, pp. 478-485, 1994.