Diffuse x-ray scattering of misfit dislocations at Si1-xGex/Si interfaces by triple crystal diffractometry

Journal of Applied Physics

Volumn 82, Issue 3, 1997, Pages 1172-1177

  Bhagavannarayana, G ^a   Zaumseil, P ^b  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); HETEROJUNCTIONS; INTERFACES (MATERIALS); LATTICE CONSTANTS; SEMICONDUCTING SILICON COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

DIFFUSE X RAY SCATTERING; MISFIT DISLOCATIONS; TRIPLE CRYSTAL DIFFRACTOMETRY;

ELECTROMAGNETIC WAVE SCATTERING;

EID: 0031207859     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365885     Document Type: Article

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