Bending of a rectangular cantilever of an atomic force microscope as a function of position along length

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5280-5281

  Miyatani, Tatsuya ^a   Fujihira, Masamichi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Atomic force microscope; Bending moment; Bending of a microcantilever; Concentrated load; Surface stress

Indexed keywords

BENDING MOMENT; MICROCANTILEVERS;

BENDING (DEFORMATION); STRESS ANALYSIS;

ATOMIC FORCE MICROSCOPY;

EID: 0031207675     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5280     Document Type: Article

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