Microstructure and activity of thin films for a microelectronic gas sensor

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 559-564

  Patel, Sanjay V ^a   Dibattista, Michael ^a   Gland, John L ^a   Schwank, Johannes W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; CHEMICAL SENSORS; HYDROGEN; MICROSTRUCTURE; PLATINUM; PROPYLENE; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

MICROELECTRONIC GAS SENSOR; SCANNING FORCE MICROSCOPY; SENSING FILMS;

THIN FILMS;

EID: 0030385769     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)