Resolution and contrast in near-field photocurrent imaging of defects on semiconductors

Journal of Applied Physics

Volumn 82, Issue 2, 1997, Pages 748-755

  Xu, Qin ^a   Gray, Matthew H ^a   Hsu, J W P ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; COMPUTER SIMULATION; IMAGING TECHNIQUES; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GERMANIUM COMPOUNDS;

NEAR FIELD PHOTOCURRENT IMAGING; SCANNING OPTICAL MICROSCOPE;

CRYSTAL DEFECTS;

EID: 0031189645     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365769     Document Type: Article

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