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Volumn 406, Issue , 1996, Pages 189-194
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Imaging of silicon carrier dynamics with near-field scanning optical microscopy
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHARACTERIZATION;
COMPUTER SIMULATION;
CRYSTAL DEFECTS;
DIFFUSION;
INFRARED TRANSMISSION;
SEMICONDUCTING SILICON;
SILICON ON INSULATOR TECHNOLOGY;
SURFACE STRUCTURE;
CARRIER LIFETIME;
FREE CARRIERS;
NEAR FIELD SCANNING OPTICAL MICROSCOPY;
SURFACE TOPOGRAPHY;
OPTICAL MICROSCOPY;
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EID: 0029754196
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (10)
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