Design considerations of a digital pressure sensor array

Transducers '91

Volumn , Issue , 1991, Pages 312-314

  Bower, Robert W ^a   Ismail, Mohd Salleh ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

INSTRUMENTS - DIGITAL READOUT; INTEGRATED CIRCUITS; MEMBRANES; SENSORS - SILICON SENSORS; SIGNAL PROCESSING - DIGITAL TECHNIQUES;

ALIGNED WAFER BONDING; DIGITAL PRESSURE SENSOR ARRAY; DIGITAL PRESSURE SWITCHES; MEMBRANE THICKNESS;

PRESSURE TRANSDUCERS;

EID: 0026366623     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)