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Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4554-4557

Production of a large-diameter uniform plasma by modified magnetron-typed radio frequency discharge

Author keywords

Large area plasma processing; Large diameter plasma; Modified magnetron typed RF plasma; Uniform plasma

Indexed keywords

ARGON; ELECTRIC DISCHARGES; MAGNETRONS; PLASMA APPLICATIONS; PLASMA DENSITY; SUBSTRATES;

PLASMA DISCHARGES;

PLASMA SOURCES;

EID: 0031176515 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.4554 Document Type: Article

Times cited : (10)

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