Automatic etch stop on buried oxide using epitaxial lateral overgrowth

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 75-78

  Gennissen, P T J ^a   Bartek, M ^a   French, P J ^a   Sarro, P M ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; OXIDES; SILICON WAFERS;

AUTOMATIC ETCH STOP; BATCH PRODUCTION; BURIED OXIDE; CRYSTAL QUALITY; ELECTROCHEMICAL ETCH STOP; EPITAXIAL LATERAL OVERGROWTH; HIGH BORON ETCH STOP; NITRIDE STRIPS; SILICON ETCHANT; TIMED ETCH STOP;

ETCHING;

EID: 0029519828     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)